Semiconductor memory device and method for fabricating the same
View Patent ↗A semiconductor memory device includes a memory cell and a dummy cell. The amount of leakage current per unit area in a capacitor in the dummy cell is larger than that in a capacitor in the memory cell.
1. A semiconductor memory device comprising:
a memory cell including a first capacitor and a memory cell transistor, the first capacitor being composed of a first lower electrode, a first capacitive insulating film and a first upper electrode, and the memory cell transistor including a first gate electrode and a first doped layer; and
a dummy cell including a second capacitor and a dummy cell transistor, the second capacitor being composed of a second lower electrode, a second capacitive insulating film and a second upper electrode, and the dummy cell transistor including a second gate electrode and a second doped layer,
wherein the first upper electrode and the second upper electrode are formed from a same conductive film,
the first lower electrode is electrically connected to the first doped layer via a first contact plug directly connected to the first lower electrode,
the second lower electrode is electrically connected to the second doped layer via a second contact plug directly connected to the second lower electrode, and
the transverse dimension of the bottom of the second lower electrode being rectangular in planer shape is shorter than the transverse dimension of the bottom of the first lower electrode being rectangular in planer shape.
2. The device of claim 1 , wherein the first capacitor and the second capacitor are both stacked capacitors; and
the bottom of the second lower electrode is uneven so that at least part of the bottom of the second lower electrode is located lower than the upper surface of the second contact plug.
3. The device of claim 1 , wherein the first capacitor and the second capacitor are both stacked capacitors;
the first lower electrode has a hollow cylindrical shape, and only an inner-wall surface of the first lower electrode opposes the first upper electrode with the first capacitive insulating film interposed therebetween; and
the second lower electrode has a hollow cylindrical shape, and an inner-wall surface and part of an outer-wall surface of the second lower electrode oppose the second upper electrode with the second capacitive insulating film interposed between the inner wall surface and the second upper electrode and between the part of the outer-wall surface and the second upper electrode.
4. The device of claim 1 , wherein the first doped layer has a lower dopant concentration than the second doped layer.
5. The device of claim 1 , wherein the first doped layer has a lower dopant concentration than the second doped layer.
6. The device of claim 1 , wherein
the memory cell comprises a memory cell array, and
the dummy cell is formed in a peripheral portion of the memory cell array.
7. The device of claim 1 , wherein the first capacitive insulating film and the second capacitive insulating film are formed from a same insulating film.
8. The device of claim 1 , wherein the first capacitor and the second capacitor are both stacked capacitors.
9. The device of claim 1 , wherein the first contact plug and the second contact plug are made of polysilicon.
10. The device of claim 1 , wherein the first lower electrode and the second lower electrode are made of HSG (hemi-spherical grained) polysilicon.
11. The device of claim 1 , wherein the first capacitive insulating film and the second capacitive insulating film are made of Ta 2 O 5 .
12. The device of claim 1 , wherein the first upper electrode and the second upper electrode are made of TiN.
13. The device of claim 1 , wherein the dummy cell is not accessed through the word lines, and does not function as memory.
14. The device of claim 1 , wherein an interlayer dielectric film is formed on the first upper electrode and the second upper electrode by a method in which high-density plasma is used.
15. The device of claim 14 , wherein the interlayer dielectric film is a NSG (non-doped silicate glass) film.
16. The device of claim 1 , wherein bit lines are formed over the first upper electrode and the second upper electrode with interlayer dielectric films interposed therebetween.