PIN diode structure with zinc diffusion region
View Patent ↗A PIN photodiode having a substrate, a first type electrode layer disposed on the substrate, a first layer of intrinsic material disposed over a portion of the first-type electrode layer, a first type window layer disposed over said intrinsic layer. An island shaped region of intrinsic material is disposed over the window layer and a dielectric layer disposed over the island region and at least the peripheral portion of said island shaped region whereby an opening is formed in the island shaped region. A dopant is diffused through the opening so as to form a PN junction that extends into the first layer of intrinsic material.
1. A PIN photodiode comprising:
a substrate;
a first type electrode layer on the substrate;
a first layer comprising a first region of intrinsic material over a portion of the first-type electrode layer;
a first type window layer over said first layer;
an island shaped region comprising a first portion of intrinsic material over said window layer;
a dielectric layer over at least a peripheral portion of said island shaped region wherein the island shaped region has an opening; and
a diffused dopant beneath an area of the opening to form a PN junction that extends into said first layer.
2. A PIN photodiode as defined in claim 1 , wherein said first layer is InGaAs.
3. A PIN photodiode as defined in claim 2 , wherein the first type window layer is composed of InP.
4. A PIN photodiode as defined in claim 3 , wherein the island shaped region is composed of InGaAs.
5. A PIN photodiode as defined in claim 4 , wherein the island shaped region is substantially circular.
6. A PIN photodiode as defined in claim 1 , wherein said dopant is zinc.
7. A PIN photodiode as defined in claim 1 wherein a doping profile in the exposed island shaped region is from 1E19 per cm 3 to 2E19 per cm 3 .
8. A PIN photodiode as defined in claim 4 , wherein a doping in the window layer is about 1E17 per cm 3 .
9. A PIN photodiode as defined in claim 1 , wherein a vertical edge of the PN junction formed by the diffused dopant is inside the island shaped region and a ring region exterior to the PN junction is completely depleted.