Method for fabricating a magnetic head including a media heating element
View Patent ↗A magnetic head including a media heating device. Following the fabrication of the heating device, a sacrificial layer of material is deposited to protect the heating device during subsequent process steps. Thereafter, write head components, such as write head induction coils and/or a P 1 pole pedestal are fabricated above the heating device, and the sacrificial layer is substantially consumed in protecting the heating device during the aggressive etching and milling steps used to create those components. Further components, including a second magnetic pole are thereafter fabricated to complete the fabrication of the write head portion of the magnetic head. The sacrificial layer may be comprised of alumina, or a material such as NiFe that can act as a seed layer for a subsequent head components such as the P 1 pole pedestal.
1. A method for fabricating a magnetic head, comprising:
fabricating a first magnetic pole of said magnetic head;
depositing a first electrical insulation layer upon said first magnetic pole;
fabricating a media heating device upon said first electrical insulation layer;
depositing a second electrical insulation layer upon said media heating device;
depositing a sacrificial layer upon said second electrical insulation layer;
fabricating a further component of said magnetic head wherein said fabrication of said further component includes a step that results in removing portions of said sacrificial layer that are disposed above said media heating device.
2. The method for fabricating a magnetic head as described in claim 1 wherein said sacrificial layer is composed of a material that serves as an electroplating seed layer.
3. The method for fabricating a magnetic head as described in claim 2 , wherein said sacrificial layer is comprised of nickel iron.
4. The method for fabricating a magnetic head as described in claim 2 , wherein said another component of the magnetic head is a second magnetic pole.
5. The method for fabricating a magnetic head as described in claim 1 , wherein said media heating device includes an electrically resistive heating element.
6. The method for fabricating a magnetic head as described in claim 1 , wherein said step of depositing a sacrificial layer includes the step of depositing the sacrificial layer material full film across a surface of a wafer wherein said magnetic head is fabricated.
7. The method for fabricating a magnetic head as described in claim 1 , wherein said further component is an induction coil portion of said magnetic head.
8. The method for fabricating a magnetic head as described in claim 1 , wherein said further component is an induction coil portion of the magnetic head, and a second magnetic pole is fabricated upon said sacrificial layer following said step that results in removing portions of said sacrificial layer.