Radiographic image conversion panel and method of manufacturing the same
There is provided a radiographic image conversion panel having a substrate made of a metal or an alloy, an oxide layer formed on the substrate by a vapor deposition technique such as sputtering, ion plating or ion beam assisted deposition, and a phosphor layer formed on the oxide layer by the vapor deposition technique. A method of manufacturing the radiographic image conversion panel is also provided. The radiographic image conversion panel is capable of suppressing for a long time corrosion of the surface of the substrate due to a reaction between a stimulable phosphor and the substrate through moisture and also capable of providing a radiographic image without any deterioration of the characteristics.
1 . A radiographic image conversion panel comprising:
a substrate made of a metal or an alloy;
an oxide layer formed on the substrate by a vapor deposition technique; and
a phosphor layer formed on the oxide layer by the vapor deposition technique.
2 . The radiographic image conversion panel according to claim 1 , wherein the oxide layer is formed by sputtering, ion plating or ion beam assisted deposition.
3 . The radiographic image conversion panel according to claim 1 , wherein the oxide layer is made of SiO 2 , Al 2 O 3 , or TiO 2 .
4 . The radiographic image conversion panel according to claim 1 , wherein the oxide layer has a thickness of 0.5 μm or more.
5 . The radiographic image conversion panel according to claim 1 , wherein a surface of the substrate has an arithmetic mean roughness R a of 0.005 to 0.1 μm.
6 . The radiographic image conversion panel according to claim 1 , wherein a surface of the substrate has a maximum height R y of 0.005 to 1 μm.
7 . The radiographic image conversion panel according to claim 1 , wherein the substrate is made of aluminum.
8 . The radiographic image conversion panel according to claim 1 , wherein the phosphor layer is made of CsBr:Eu.
9 . A method of manufacturing a radiographic image conversion panel, comprising the steps of:
forming an oxide layer on a substrate made of a metal or an alloy by a vapor deposition technique; and
forming a phosphor layer on the oxide layer by the vapor deposition technique.