Ohmic contact on p-type GaN
View Patent ↗An ohmic contact in accordance with the invention includes a layer of p-type GaN-based material. A first layer of a group II-VI compound semiconductor is located adjacent to the layer of p-type GaN-based material. The ohmic contact further includes a metal layer that provides metal contact. A second layer of a different II-VI compound semiconductor is located adjacent to the metal layer.
1. An ohmic contact comprising:
a layer of p-type GaN-based material;
a first layer of p-type group II-VI compound semiconductor material comprising a first group VI element, the first layer located adjacent to the layer of p-type GaN-based material;
a layer of metal configured to provide a metal contact;
a second layer of p-type group II-VI compound semiconductor material comprising a second group VI element different than the first group VI element, the second layer located adjacent to the layer of metal; and
a p-type semiconductor stack sandwiched between the first layer and the second layer, the p-type semiconductor stack comprising:
a third layer of p-type group II-VI compound semiconductor material comprising the first group VI element and excluding the second group VI element; and
a fourth layer of p-type group II-VI compound semiconductor material located adjacent the third layer, the fourth layer comprising the second group VI element and excluding the first group VI element.
2. The ohmic contact of claim 1 , wherein the p-type GaN-based material is In x Al y Ga 1-x-y N.
3. The ohmic contact of claim 2 , wherein:
the first layer of p-type group II-VI compound semiconductor material has a general formula XY wherein X is an element selected from group II and Y is the first group VI element;
the second layer of p-type group II-VI compound semiconductor material has a general formula XZ wherein X is an element selected from group II and Z is the second group VI element;
the third layer of p-type group II-VI compound semiconductor material is located adjacent to the first layer and has the general formula XZ wherein X is the element selected from group II and Z is the second group VI element; and
the fourth layer of p-type group II-VI compound semiconductor material is located adjacent to the third layer and has the general formula XY wherein X is the element selected from group II and Y is the first group VI element.
4. The ohmic contact of claim 3 , wherein a first valence band offset between the second layer of the p-type group II-VI compound semiconductor material and the layer of metal is less than a second valence band offset between the layer of p-type GaN-based material and the layer of metal.
5. The ohmic contact of claim 4 , wherein the first layer comprises a first one of a) ZnTe, b) ZnSe, and c) ZnO and wherein the second layer comprises a second one of a) ZnTe, b) ZnSe, and c) ZnO, the first one being different than the second one.
6. The ohmic contact of claim 5 , wherein the p-type semiconductor stack has a plurality of layers comprising:
a first set of layers each containing the p-type group II-VI compound semiconductor comprising the first group VI element;
a second set of layers each containing the p-type group II-VI compound semiconductor comprising the second group VI element; and
wherein each of the first set of layers is interspersed with each of the second set of layers.
7. The ohmic contact of claim 6 , wherein:
layer thickness of each individual layer of the first set of layers increases as the individual layer is located further away from the p-type GaN-based material; and
layer thickness of each individual layer of the second set of layers decreases as the individual layer is located further away from the p-type GaN-based material.
8. The ohmic contact of claim 7 , wherein the layer of metal comprises at least one of gold and platinum.