Device packages with low stress assembly process
View Patent ↗A microelectromechanical device package and a low-stress inducing method for packaging a microelectromechanical device are disclosed in this invention. The microelectromechanical device is accommodated within a cavity comprised by a first package substrate and a second substrate, wherein a third substrate is disposed between and bonded to both the microelectromechanical device lower semiconductor substrate and the package bottom substrate. The first and second package substrates are then bonded so as to package the microelectromechanical device inside.
1. A packaged microelectromechanical device, comprising:
a microelectromechanical array device that comprises a semiconductor substrate;
a package for the microelectromechanical array device, the package comprising a ceramic package substrate;
a discontinuous insert substrate that is disposed between the semiconductor substrate and the ceramic package substrate; and
wherein the discontinuous insert substrate has a CTE value that is the same as a CTE value of the semiconductor substrate or between the value of the semiconductor substrate and a CTE value of the package substrate.
2. The device of claim 1 , wherein the semiconductor substrate is silicon.
3. The device of claim 2 , wherein the microelectromechanical array comprises a light transmissive substrate bonded to the semiconductor substrate.
4. The device of claim 3 , wherein the light transmissive substrate is glass or quartz.
5. The device of claim 3 , wherein the microelectromechanical array comprises a plurality of micromirrors formed on the light transmissive substrate.
6. The device of claim 5 , wherein at least 500,000 micromirrors are disposed on the light transmissive substrate.
7. The device of claim 1 , wherein the microelectromechanical array are formed directly on the semiconductor substrate.
8. A packaged microelectromechanical device, comprising:
a microelectromechanical array device that comprises a semiconductor substrate;
a package substrate having a cavity in which the microelectromechanical array device is disposed; and
a discontinuous insert substrate that is disposed between the semiconductor substrate and the package substrate in a direction perpendicular to the package substrate.
9. The device of claim 8 , wherein the package substrate is ceramic.
10. A packaged microelectromechanical device, comprising:
a microelectromechanical array device that comprises a semiconductor substrate;
a ceramic package substrate having a supporting surface; and
discontinuous insert substrate that is disposed between the semiconductor substrate and the supporting surface of the ceramic package substrate in a direction perpendicular to the package substrate.
11. The device of claim 10 , wherein the supporting surface is within a cavity of the ceramic package substrate.