Nozzle members, compositions and methods for micro-fluid ejection heads
View Patent ↗An improved photoimaged nozzle plate for a micro-fluid ejection head, a micro-fluid ejection head containing the nozzle plate, and methods for making a micro-fluid ejection head. The improved nozzle plate is provided by a photoresist nozzle plate layer applied to a thick film layer on a semiconductor substrate containing fluid ejector actuators. The photoresist nozzle plate layer has a plurality of nozzle holes therein. Each of the nozzle holes are formed in the nozzle plate layer from an exit surface of the nozzle plate layer to an entrance surface of the nozzle plate layer. Each of the nozzle holes has a reentrant hole profile with a wall angle greater than about 4° up to about 30° measured from an axis orthogonal to a plane defined by the exit surface of the nozzle plate layer.
1. An improved photoimaged nozzle member for a micro-fluid ejection head, the nozzle member comprising a photoresist nozzle layer applied adjacent a thick film layer on a substrate having fluid ejector actuators, the photoresist nozzle layer having a plurality of nozzles therein, wherein the nozzles are formed in the nozzle layer from an exit surface of the nozzle layer to an entrance surface of the nozzle layer, and the nozzles have a reentrant profile with a wall angle greater than about 4° up to about 30° measured from an axis orthogonal to a plane defined by the exit surface of the nozzle layer.
2. The nozzle member of claim 1 , wherein the photoresist nozzle layer comprises a single layer of photoresist material.
3. The nozzle member of claim 2 , wherein the single layer of photoresist material comprises a negative photoresist resin containing one or more differential ultraviolet light absorbing components dispersed therein.
4. The nozzle member of claim 3 , wherein the light absorbing components are selected from the group consisting of carbon black particles, carbon nanotubes, photoacid generators, and polyetheretherketone.
5. The nozzle member of claim 1 , wherein the photoresist nozzle layer comprises at least a first layer of a first photoresist material and a second layer of a second photoresist material.
6. The nozzle member of claim 5 , wherein the first photoresist material includes more ultraviolet light absorbing components than the second photoresist material.
7. The nozzle member of claim 6 , wherein the light absorbing components are selected from the group consisting of carbon black particles, carbon nanotubes, photoacid generators, naphthalene based solvents, polyimide particles, and polyetheretherketone.
8. A micro-fluid ejection head structure comprising the nozzle member of claim 1 .
9. A micro-fluid ejection device comprising the micro-fluid ejection head of claim 8 .