III-nitride power semiconductor device with a current sense electrode

1. A field effect power semiconductor device comprising:

in an active cell thereof;

a III-nitride heterojunction region;

a first power electrode electrically connected to said III-nitride heterojunction region and a first power pad;

a second power electrode opposite and spaced from said first power electrode electrically connected to said III-nitride heterojunction region and to a second power pad; and

a third power electrode opposite and spaced from said first power electrode electrically connected to said III-nitride heterojunction region and to a third power pad: wherein the device comprises a first gate structure having one finger disposed between said first power electrode and said second power electrode, an another finger disposed between said first power electrode and said third power electrode.

2. The device of claim 1 , wherein said gate structure makes schottky contact with said top surface.

3. The device of claim 1 , wherein said gate structure includes a gate insulation over said III-nitride heterojunction region and a gate electrode over said gate insulation.

4. The device of claim 3 , wherein said gate insulation is comprised of SiO 2 , or Si 3 N 4 , or diamond.

5. The device of claim 1 , wherein a low resistivity contact body is disposed between said power electrodes and said III-nitride heterojunction region.

6. The device of claim 1 , wherein said heterojunction includes a first III-nitride semiconductor body comprised of one alloy of InAlGaN, and a second III-nitride semiconductor body comprised of another alloy of InAlGaN.

7. The device of claim 6 , wherein said first III-nitride semiconductor body is comprised of GaN, and said second Ill-nitride semiconductor body is comprised of AlGaN.

8. The device of claim 1 , wherein said III-nitride heterojunction region is disposed over a substrate.

9. The device of claim 8 , wherein said substrate is comprised of Si, SiC, Sapphire, GaN or GaAs.

10. The device of claim 8 , further comprising a buffer layer disposed between said III-nitride heterojunction region and said substrate.

11. The device of claim 10 , wherein said buffer layer is comprised of AlN.

12. The device of claim 1 , further comprising a second gate structure disposed between said first power electrode and said second power electrode.

13. The device of claim 1 , further comprising a first conductive feed electrically connecting said first power electrode to said first power pad, and a second conductive feed electrically connecting said second power electrode to said second power pad.

14. A field effect power semiconductor device comprising:

a III-nitride active region, said active region including a plurality of active cells, each cell including at least a source electrode, and a drain electrode each electrically connected to a respective pad; and

a current sense electrode arranged opposite said drain electrode and electrically connected to a respective current sense pad;

wherein the device comprises a first gate structure disposed between said source electrode and said drain electrode, and said drain electrode and said current sense electrode.

15. A device according to claim 14 , wherein said III-nitride active region includes a heterojunction comprised of a first semiconductor body comprising an alloy of InAlGaN, and a second semiconductor body comprising another alloy of InAlGaN.

16. A device according to claim 15 , wherein said first semiconductor body is comprised of GaN, and said second semiconductor body is comprised of AlGaN.

17. A device according to claim 14 , further comprising a second gate structure disposed between said source electrode and said drain electrode.