Magnetic head with air bearing surface protection film and manufacturing method thereof
View Patent ↗To promote reduction in thickness of an air bearing surface protective film of a magnetic head, a magnetic head having an air bearing surface protective film consisting only of a thin carbon film while excluding formation of a dead layer by ion incidence as less as possible to the read/write device, and a manufacturing method therefore, are provided. In an embodiment, an air bearing surface protective film of a magnetic head comprises a thin carbon film, in which the mass density a lowermost layer of the air bearing surface protective film on the side of a magnetic device is made lower compared with a thin carbon film constituting other adjacent layers. Further, the manufacturing method comprises deposition under the control of time for the incident angle of ion flow to a substrate to be processed and deposition under the control of time for the ion flow energy to a substrate to be processed.
1. A magnetic head in which an air bearing surface protective film formed on an air bearing surface of a magnetic head slider including a multi-layered structure of stacked thin carbon films, and mass density of a first thin carbon film constituting the lowermost layer of the air bearing surface protective film in contact with the magnetic head slider is made lower compared with mass density of a second thin carbon film constituting the uppermost layer of the protective film;
wherein the multi-layered stacked structure of thin carbon films does not include a silicon film; and
wherein the second thin carbon film is not grown from the first thin carbon film.
2. A magnetic head according to claim 1 , wherein the mass density of carbon atoms of the second thin carbon film is from about 2.5 to 3.4 g·cm-3 and the mass density of the first carbon film constituting the lowermost surface of the air bearing surface protective film in contact with the magnetic device is from about 1.5 to 2.4 g·cm-3.
3. A magnetic head according to claim 1 , wherein the thickness of the second thin carbon film is from about 2.5 to 46.5 Å and the thickness of the first thin carbon film in contact with the magnetic device is from about 3.5 to 47.5 Å.
4. A magnetic head according to claim 1 , wherein the atomic distance of carbon atoms constituting the second thin carbon film always has a smaller value than the atomic distance of carbon atoms constituting the first thin carbon film in contact with the magnetic device.
5. A magnetic head according to claim 1 , wherein an SP3 bonding ratio of carbon atoms constituting the second thin carbon film always has a value larger than the SP3 bonding ratio of carbon atoms constituting the first thin carbon film in contact with the magnetic device.
6. A magnetic head in which an air bearing surface protective film formed on an air bearing surface of a magnetic head slider including a multi-layered structure of stacked thin carbon films including a first thin carbon film and a second thin carbon film formed over the first thin carbon film, in which mass density of the air bearing surface protective film increases toward an uppermost surface away from the magnetic head slider of the air bearing surface protective film;
wherein the multi-layered stacked structure of thin carbon films does not include a silicon film;
wherein the total film thickness of the multi-layered stacked structure of thin carbon films is 20 Å or less.
7. A magnetic head according to claim 6 , wherein the mass density of carbon atoms constituting the second thin carbon film is from about 2.5 to 3.4 g·cm-3 and the mass density of the first in contact with the magnetic device is from about 1.5 to 2.4 g·cm-3.
8. A magnetic head according to claim 6 , wherein the thickness of the second thin carbon film is from about 2.5 to 46.5 Å and the thickness of the first thin carbon film in contact with the magnetic device is from about 3.5 to 47.5 Å.
9. A magnetic head according to claim 6 , wherein the atomic distance of carbon atoms constituting the second thin carbon film always has a smaller value than the atomic distance of carbon atoms constituting the first thin carbon film in contact with the magnetic device.
10. A magnetic head according to claim 6 , wherein an SP3 bonding ratio of carbon atoms constituting the second thin carbon film always has a value larger than the SP3 bonding ratio of carbon atoms constituting the first thin carbon film in contact with the magnetic device.