Magnetic recording medium with diamond-like carbon protective film, and manufacturing method thereof
View Patent ↗Embodiments of the invention provide a magnetic recording medium superior in terms magnetic head flying performance, abrasion resistant reliability and corrosion resistance and a method for manufacturing the same. In one embodiment, method for manufacturing a magnetic recording medium, comprising forming at least an adhesion layer, a soft magnetic layer, a granular magnetic film and a diamond-like carbon (DLC) protective film on a nonmagnetic substrate. While the DLC protective film layer to protect the granular magnetic layer of the magnetic recording medium is formed, hydrocarbon gas is mixed with hydrogen gas and a bias voltage is applied to the substrate.
1. A method for manufacturing a perpendicular magnetic recording medium, comprising forming at least an adhesion layer, a soft magnetic layer, a granular magnetic film and a diamond-like carbon protective film on a nonmagnetic substrate,
wherein the diamond-like carbon protective film is formed by a CVD method in which ethylene gas and hydrogen gas are used in a volume ratio of the hydrogen gas to the ethylene gas (H 2 /C 2 H 4 ) of about 0.5 to 2 and a bias voltage is applied to the nonmagnetic substrate while the granular magnetic film is maintained at a temperature of 75° C. or less, wherein the diamond-like carbon protective film has a hydrogen content of less than about 25%, a thickness of the diamond-like carbon protective film being less than 0.5 nm.
2. The method for manufacturing a magnetic recording medium according to claim 1 , further comprising:
cooling down the substrate after the soft magnetic layer is formed; and
forming an intermediate layer before forming the granular magnetic film.
3. The method for manufacturing a magnetic recording medium according to claim 1 , further comprising forming a lubricant layer after the protective film is formed, wherein the nonmagnetic substrate is a glass substrate.
4. The method for manufacturing a magnetic recording medium according to claim 3 , wherein:
the soft magnetic layer comprises a first soft magnetic film, a second soft magnetic film and a Ru layer laid between the first soft magnetic film and the second soft magnetic film; and
the granular magnetic layer contains cobalt, chromium, platinum and silicon dioxide.
5. The method for manufacturing a magnetic recording medium according to claim 1 , wherein the diamond-like carbon protective film has a hydrogen content of less than about 20%.
6. The method for manufacturing a magnetic recording medium according to claim 1 , wherein the diamond-like carbon protective film is continuously formed by the CVD method into a single continuous diamond-like carbon film.
7. The method for manufacturing a magnetic recording medium according to claim 1 , wherein the diamond-like carbon protective film is a nonlaminated layer of diamond-like carbon.