Semiconductor device used as electro-optical device having channel formation region containing first element, and source or drain region containing second element
View Patent ↗A semiconductor device having an island semiconductor film which is a channel formation region and a semiconductor film which is a source or drain region being in contact with a side face of the island semiconductor film, and a method for manufacturing the semiconductor device are disclosed. The manufacturing costs can be suppressed by forming the island semiconductor film which is to be a channel formation region and the semiconductor film which is to be a source or drain region without using a doping apparatus. The source or drain region is in contact with the side surface of the island semiconductor film which is the channel formation region, a depletion layer is broaden not only in a film thickness direction but also in the crosswise direction and an electric field due to drain voltage is relieved. Therefore, a semiconductor device with high reliability can be manufactured.
1. A semiconductor device comprising:
a gate electrode over a substrate;
a gate insulating film over the gate electrode;
an island semiconductor film containing an element belonging to group 13 in a periodic table over the gate insulating film, wherein the island semiconductor film is formed of a silicon film;
a first semiconductor film containing an element belonging to group 15 in a periodic table being in direct contact with a first part of a top surface of the island semiconductor film containing the element belonging to group 13, a first side face of the island semiconductor film containing the element belonging to group 13, and a first top surface of the gate insulating film;
a second semiconductor film containing an element belonging to group 15 in a periodic table being in direct contact with a second part of the top surface of the island semiconductor film containing the element belonging to group 13, a second side face of the island semiconductor film containing the element belonging to group 13, and a second top surface of the gate insulating film;
a first electrode over the first semiconductor film containing the element belonging to group 15;
a second electrode over the second semiconductor film containing the element belonging to group 15; and
an insulating film over the first electrode and the second electrode,
wherein the island semiconductor film containing the element belonging to group 13 is a channel formation region,
wherein the first semiconductor film containing the element belonging to group 15 is a source region, and
wherein the second semiconductor film containing the element belonging to group 15 is a drain region.
2. The semiconductor device according to claim 1 , wherein the island semiconductor film comprises a crystalline semiconductor film.
3. The semiconductor device according to claim 1 , wherein the first and second semiconductor films are silicon films.
4. The semiconductor device according to claim 1 , wherein the substrate has flexibility.
5. The semiconductor device according to claim 1 , wherein the first electrode covers an end of the first semiconductor film.
6. The semiconductor device according to claim 1 ,
wherein the first part of the top surface of the island semiconductor film is a first planer surface, and
wherein the second part of the top surface of the island semiconductor film is a second planer surface.
7. The semiconductor device according to claim 1 ,
wherein the first top surface of the gate insulating film is overlapped with the gate electrode, and
wherein the second top surface of the gate insulating film is overlapped with the gate electrode.
8. The semiconductor device according to claim 1 ,
wherein the island semiconductor film is a microcrystalline semiconductor film.
9. The semiconductor device according to claim 1 ,
wherein in the channel formation region, a broadening of a depletion layer along a crosswise direction is larger than a broadening of the depletion layer along a thickness direction, and
wherein the crosswise direction is a direction in parallel to the substrate.
10. A semiconductor device comprising:
a gate electrode over a substrate;
a first insulating film over the gate electrode;
an island semiconductor film containing a first element over the first insulating film, wherein the island semiconductor film is formed of a silicon film;
a first semiconductor film containing a second element being in direct contact with a first part of a top surface of the island semiconductor film containing the first element, a first side face of the island semiconductor film containing the first element, and a first top surface of the first insulating film;
a second semiconductor film containing the second element being in direct contact with a second part of the top surface of the island semiconductor film containing the first element, a second side face of the island semiconductor film containing the first element, and a second top surface of the first insulating film;
a first electrode over the first semiconductor film containing the second element;
a second electrode over the second semiconductor film containing the second element;
a second insulating film over the first electrode and the second electrode; and
a pixel electrode over the second insulating film and being electrically connected to the first electrode
wherein the island semiconductor film containing the first element is a channel formation region,
wherein the first semiconductor film containing the second element is a source region, and
wherein the second semiconductor film containing the second element is a drain region.
11. The semiconductor device according to claim 10 , wherein the island semiconductor film is a crystalline semiconductor film.
12. The semiconductor device according to claim 10 , wherein a conductivity type of the island semiconductor film containing the first element is opposite to that of the first and second semiconductor films containing the second element.
13. The semiconductor device according to claim 10 , wherein the first and second semiconductor films are silicon films.
14. The semiconductor device according to claim 10 , wherein the substrate has flexibility.
15. The semiconductor device according to claim 10 , wherein the first electrode covers an end of the first semiconductor film.
16. The semiconductor device according to claim 10 ,
wherein the first part of the top surface of the island semiconductor film is a first planer surface, and
wherein the second part of the top surface of the island semiconductor film is a second planer surface.
17. The semiconductor device according to claim 10 ,
wherein the first top surface of the first insulating film is overlapped with the gate electrode, and
wherein the second top surface of the first insulating film is overlapped with the gate electrode.
18. The semiconductor device according to claim 10 ,
wherein the island semiconductor film is a microcrystalline semiconductor film.
19. The semiconductor device according to claim 10 ,
wherein in the channel formation region, a broadening of a depletion layer along a crosswise direction is larger than a broadening of the depletion layer along a thickness direction, and
wherein the crosswise direction is a direction in parallel to the substrate.