Method of fabricating a magnetic recording head for perpendicular recording with enhanced covering power
View Patent ↗The main magnetic pole piece of a magnetic head for perpendicular magnetic recording preferably has an inverted trapezoidal shape in order to maintain a sufficient recording magnetic field. Embodiments of the present invention enhance the covering power of the protective film around the main magnetic pole piece of the magnetic head and thereby ensure reliability even when the main magnetic pole piece has such a shape. In one embodiment, the protective film for protecting the main magnetic pole piece is formed by a sputtering apparatus while applying a bias, or it is formed by a carousel type sputtering apparatus or the chemical vapor deposition (CVD) technique.
1. A method for manufacturing a magnetic head, comprising:
forming a read head on a substrate;
forming a lower magnetic pole piece on said read head;
forming a main magnetic pole piece on said lower magnetic pole piece; and
forming a protective film on a surface of said main magnetic pole piece for protecting said main magnetic pole piece,
wherein said protective film is formed while applying a bias to said substrate,
wherein an air bearing surface of said main magnetic pole piece facing a magnetic disk has a tapered shape in which a length of said air bearing surface in a track width direction decreases with decreasing distance from said substrate, and is narrower than an overall width of the lower magnetic pole piece,
wherein said protective film fully covers the tapered shape of the main magnetic pole piece,
wherein a thickness of said protective film is constant along a perpendicular between the surface of said main magnetic pole piece and an outer surface of the said protective film such that said protective film conforms to the surface of said main magnetic pole piece.
2. The method as claimed in claim 1 , wherein said read head includes:
a lower magnetic shield formed on said substrate;
a magneto-resistive element formed on said lower magnetic shield; and
an upper magnetic shield formed on said magneto-resistive element.
3. The method as claimed in claim 1 , wherein said main magnetic pole piece has a throat height of about 300 nm or less.
4. The method as claimed in claim 1 , wherein said protective film is formed by a sputtering technique.
5. The method as claimed in claim 1 , wherein said protective film is foamed by a CVD technique.
6. The method as claimed in claim 5 , wherein said protective film comprises a material selected from the group consisting of Si, SiON, SiC, SiO 2 , Si 3 N 4 , and diamond-like carbon (DLC).
7. The method as claimed in claim 1 , wherein said protective film is formed by a sputtering apparatus while applying a bias.
8. The method as claimed in claim 1 , wherein said protective film is formed of alumina containing no additives or containing SiO 2 .
9. The method as claimed in claim 1 , wherein:
said protective film includes a first protective film and a second protective film; and
said first protective film is formed without applying a bias, and said second protective film is formed while applying a bias.
10. The method as claimed in claim 9 , wherein a thickness of said second protective film is larger than a thickness of said first protective film.
11. The method as claimed in claim 1 , wherein said protective film comprises a material selected from the group consisting of Al 2 O 3 , SiC, AlN, Ta 2 O 5 , TiC, TiO 2 , and SiO 2 .