Thin film transistor array panel and manufacturing method thereof
View Patent ↗A thin film transistor array panel is provided, which includes a substrate, a plurality of gate line formed on the substrate, a plurality of common electrodes having a transparent conductive layer on the substrate, a gate insulating layer covering the gate lines and the common electrodes, a plurality of semiconductor layers formed on the gate insulating layer, a plurality of data lines including a plurality of source electrodes and formed on the semiconductor layer and the gate insulating layer, a plurality of drain electrodes formed on the semiconductor layer and the gate insulating layer, and a plurality of pixel electrodes overlapping the common electrodes and connected to the drain electrodes. Because the common electrodes are made of ITON, IZON, or a-ITON, or a double layer of ITO/ITON, IZO/IZON, or a-a-ITO/a-ITON, when H2 or SiH4 are injected to form a silicon nitride (SiNX) layer on the common electrodes, the opaque metal Sn or Zn in which the metal component is reduced in the IZO, ITO, or a-ITO is not produced on the surfaces of the common electrode.
1. A method of manufacturing a thin film transistor array panel, comprising:
forming a gate line on a substrate;
depositing a gate insulating layer covering the gate line;
forming a semiconductor layer on the gate insulating layer;
forming a data line and a drain electrode on the gate insulating layer and the semiconductor layer; and
forming a pixel electrode connected to the drain electrode,
wherein the pixel electrode is comprised of a transparent conductive layer which comprises one or more of indium tin oxide nitride (ITON), indium zinc oxide nitride (IZON), and amorphous indium tin oxide nitride (a-ITON).
2. The method of claim 1 , further comprising:
cleaning the exposed portion of the semiconductor layer using H 2 after forming the pixel electrode.
3. The method of claim 1 , wherein the transparent conductive layer is comprised of a double layer structure of indium tin oxide/indium tin oxide nitride (ITO/ITON) or indium zinc oxide/indium zinc oxide nitride (IZO/IZON) or amorphous indium tin oxide/amorphous indium tin oxide nitride (a-ITO/a-ITON).
4. The method according to claim 1 , wherein the nitrogen content of the transparent conductive layer ranges from about 0.001 atomic percent to 0.090 atomic percent.
5. The method according to claim 1 , wherein the nitrogen content of the ITON, IZON or a-ITON ranges from about 0.001 atomic percent to 0.090 atomic percent.