Liquid crystal display and fabrication method thereof
View Patent ↗A liquid crystal display has a storage capacitor of storage on common type in a pixel region with a passivation film of an inorganic insulating layer and an organic layer stacked on the inorganic insulating layer. The liquid crystal display includes: a storage capacitor lower electrode formed in the pixel region; a gate insulating layer formed on the storage capacitor lower electrode; the passivation film formed on the gate insulating layer, and a pixel electrode formed on the inorganic insulating layer. In the storage capacitance region of the pixel region, the organic insulating layer is partially or wholly removed and the pixel electrode functions as a storage capacitor upper electrode.
1. A method of fabricating a liquid crystal display, the method comprising:
depositing a metal film on a substrate and patterning the deposited metal film to form a gate electrode in a transistor region and a storage capacitor lower electrode in a pixel region;
depositing a gate insulating layer;
sequentially depositing an intrinsic semiconductor layer and an impurity-doped semiconductor layer on the gate insulating layer and patterning the deposited intrinsic semiconductor layer and impurity-doped semiconductor layer to form an active layer and an ohmic contact layer in the transistor region;
depositing a metal layer and patterning the deposited metal film to form a source electrode and a drain electrode in the transistor region;
sequentially depositing an inorganic insulating layer and an organic insulating layer to form a passivation film;
performing a full exposure to define a contact hole over a drain region of the transistor region and a diffraction exposure over the storage capacitor lower electrode of the pixel region by using a mask having a diffraction pattern;
developing and etching to form the contact hole exposing the drain electrode in the transistor region, and etching the passivation film on the storage capacitor lower electrode of the pixel region such that the passivation film has a predetermined thickness; and
depositing a transparent metal film and patterning the deposited transparent metal film to form a pixel electrode functioning as a storage capacitor upper electrode,
wherein the etching the passivation film on the storage capacitor lower electrode of the pixel region comprises removing a portion of the organic insulating layer to form a passivation film that is thinner than the passivation film as deposited.
2. The method according to claim 1 , further comprising selecting the organic insulating layer to be a photo-reactive organic insulating layer.
3. The method according to claim 1 , further comprising forming the pixel electrode on the inorganic insulating layer in a substantially ‘U’ letter when viewed from a cross-sectional viewpoint of the liquid crystal display.
4. The fabrication method according to claim 1 , further comprising forming the storage capacitor upper electrode wider than the storage capacitor lower electrode.