Heating crucible and deposition apparatus including the same
View Patent ↗A heating crucible and a deposition apparatus are provided that have a uniform deposition rate and good reproducibility. The heating crucible of the deposition apparatus includes a titanium body with an internal cavity to contain a material to be deposited and an opening to emit the material to be deposited, a wire to heat the body, and an insulator to insulate the body from the wire.
1. Heating crucible, comprising:
a body made of titanium;
a wire capable of heating the body; and
an insulator capable of electrically insulating the body from the wire, the insulator being interposed between the body and the wire, and being in direct contact with the body and the wire; and
a supporter capable of supporting the body,
wherein the wire is extended from a top to both an inside wall and an outside wall of the supporter,
wherein the body further comprises an internal cavity capable of containing a material to be deposited and an opening capable of emitting the material to be deposited,
wherein the body further comprises a protrusion capable of supporting the body,
wherein the protrusion supports the body on an upper section of the supporter capable of supporting the body, and
wherein the protrusion directly contacts an upper surface of the insulator.
2. The heating crucible of claim 1 ,
wherein the insulator is made of ceramic.
3. The heating crucible of claim 1 ,
wherein the supporter is cylindrically shaped, and
wherein the wire is in the supporter, and
wherein the wire forms a plurality of “U” shapes that extend downward from the top of the supporter along the inside and outside walls of the supporter.
4. The heating crucible of claim 1 ,
wherein the supporter is cylindrically shaped, and
wherein the wire is in the supporter, and
wherein the wire extends from the top of the supporter along the inside walls of the supporter.
5. The heating crucible of claim 1 ,
wherein the supporter is cylindrically shaped, and
wherein the wire is in the supporter, and
wherein the wire is in the shape of a coil.
6. The heating crucible of claim 1 ,
wherein the insulator is interposed between the protrusion and the supporter, or between the protrusion and the wire.
7. The heating crucible of claim 1 ,
wherein the body further comprises a cover having an opening.
8. A deposition apparatus, comprising:
a substrate supporter to support a substrate, and
a heating crucible facing the substrate, the heating crucible being capable of emitting a material to be deposited on the substrate,
wherein the heating crucible comprises:
a body made of titanium,
a wire capable of heating the body,
an insulator capable of electrically insulating the body from the wire, the insulator being interposed between the body and the wire, and being in direct contact with the body and the wire;
a supporter capable of supporting the body,
wherein the wire is extended from a top to both an inside wall and an outside wall of the supporter,
wherein the body further comprises an internal cavity capable of containing a material to be deposited and an opening capable of emitting the material to be deposited,
wherein the body further comprises a protrusion capable of supporting the body,
wherein the protrusion supports the body on an upper section of the supporter capable of supporting the body, and
wherein the protrusion directly contacts an upper surface of the insulator.
9. The deposition apparatus of claim 8 ,
wherein the insulator is made of ceramic.
10. The deposition apparatus of claim 8 ,
wherein the supporter is cylindrically shaped, and
wherein the wire is in the supporter, and
wherein the wire forms a plurality of “U” shapes that extend downward from the top of the supporter along the inside and outside walls of the supporter.
11. The deposition apparatus of claim 8 ,
wherein the supporter is cylindrically shaped, and
wherein the wire is in the supporter, and
wherein the wire extends from the top of the supporter along the inside walls of the supporter.
12. The deposition apparatus of claim 8 ,
wherein the supporter is cylindrically shaped, and
wherein the wire is in the supporter, and
wherein the wire is in the shape of a coil.
13. The deposition apparatus of claim 8 , wherein the insulator is interposed between the protrusion and the supporter, or between the protrusion and the wire.
14. The deposition apparatus of claim 8 ,
wherein the body further comprises a cover having an opening.