Liquid crystal display panel having spacers wedged in three-layered conductive lines and manufacturing method thereof
View Patent ↗A liquid crystal display panel including a first substrate, a second substrate and a liquid crystal layer is provided. The first substrate has a plurality of scan lines, data lines and thin film transistors thereon, and the thin film transistors are driven by the scan lines and data lines. In particular, a plurality of patterned openings are formed in at least one of the scan lines and data lines. The second substrate having a plurality of photo spacers thereon is disposed above the first substrate, and the photo spacers are wedged in the patterned openings. The liquid crystal layer is disposed between the first substrate and second substrate. Because the photo spacers are wedged in the patterned openings, the cell gap between the first and second substrates can be kept uniformly.
1. A liquid crystal display panel, comprising:
a first substrate, having a plurality of scan lines, data lines and thin film transistors are disposed on the first substrate, the thin film transistors being driven by the scan lines and the data lines, at least one of the scan lines and the data lines having a plurality of patterned openings with a first necking portion, wherein each of the scan lines and each of the data lines comprise:
a first conductive layer, having a first opening;
a second conductive layer, disposed on the first conductive layer, wherein the second conductive layer has a second opening, and the second opening is smaller than the first opening; and
a third conductive layer, disposed on the second conductive layer, wherein the third conductive layer has a third opening, the third opening is larger than the second opening, and each of the patterned openings comprises the first opening, the second opening and the third opening;
a second substrate, disposed above the first substrate, wherein a plurality of photo spacers with a second necking portion are disposed on the second substrate and the photo spacers with the second necking portion are wedged in the patterned openings with the first necking portion; and
a liquid crystal layer, disposed between the first substrate and the second substrate.
2. The liquid crystal display panel of claim 1 , wherein the scan lines and the data lines have the patterned openings, and the heights of the photo spacers wedged in the patterned openings of the scan lines are different from the heights of the photo spacers wedged in the patterned openings of the data lines.
3. The liquid crystal display panel of claim 1 , wherein a size of an upper portion of the second opening is larger than a size of a lower portion of the second opening.
4. The liquid crystal display panel of claim 1 , wherein an etching rate of the first conductive layer and the third conductive layer is larger than an etching rate of the second conductive layer.
5. The liquid crystal display panel of claim 4 , wherein a material of the first conductive layer and the third conductive layer comprises Al.
6. The liquid crystal display panel of claim 4 , wherein a material of the second conductive layer comprises Ti.
7. The liquid crystal display panel of claim 1 , wherein each of the photo spacers comprises a top portion and a body, and a size of the top portion is larger than a size of the body.
8. The liquid crystal display panel of claim 1 , further comprising a color filter array layer, disposed on the first substrate or on the second substrate.
9. The liquid crystal display panel of claim 1 , wherein the first substrate comprises an active device matrix substrate.
10. The liquid crystal display panel of claim 1 , wherein the second substrate comprises a color filter substrate.
11. A process for manufacturing a liquid crystal display panel, comprising:
providing a first substrate, wherein a plurality of scan lines, data lines and thin film transistors are formed on the first substrate, the thin film transistors are driven by the scan lines and the data lines, and a plurality of patterned openings with a first necking portion are formed in at least one of the scan lines and the data lines, a process for forming the scan lines or the data lines comprising:
forming a first conductive layer, a second conductive layer and a third conductive layer over the first substrate sequentially;
forming a patterned photo-resist layer on the third conductive layer; and etching the third conductive layer, the second conductive layer and the first conductive layer sequentially to define the scan lines or the data lines, in a meantime, a first opening being formed in the first conductive layer, a second opening being formed in the second conductive layer, a third opening being formed in the third conductive layer, wherein the second opening is smaller than the first opening and the third opening, and each of the patterned openings comprises the first opening, the second opening and the third opening;
providing a second substrate, disposed above the first substrate, wherein a plurality of photo spacers with a second necking portion are disposed on the second substrate; and
assembling the first substrate and the second substrate, wherein the photo spacers with the second necking portion are wedged in the patterned openings with the first necking portion, and a liquid crystal layer is disposed between the first substrate and the second substrate.
12. The process for manufacturing a liquid crystal display panel of claim 11 , wherein a size of an upper potion of the second opening is larger than a size of a lower portion of the second opening.
13. The process for manufacturing a liquid crystal display panel of claim 11 , wherein an etching rate of the first conductive layer and the third conductive layer is larger than an etching rate of the second conductive layer.
14. The process for manufacturing a liquid crystal display panel of claim 13 , wherein a material of the first conductive layer and the third conductive layer comprises Al.
15. The process for manufacturing a liquid crystal display panel of claim 13 , wherein a material of the second conductive layer comprises Ti.
16. The process for manufacturing a liquid crystal display panel of claim 13 , wherein each of the photo spacers comprises a top portion and a body, and a size of the top portion is larger than a size of the body.
17. The process for manufacturing a liquid crystal display panel of claim 13 , further comprising a step of forming a color filter array layer on the first substrate or on the second substrate.