Preventing substrate deformation
View Patent ↗A substrate prevented from being deformed due to thermal stress or deposition stress includes a deformation preventing layer arranged on one surface of the substrate. The substrate can include a thin film transistor arranged on one surface of the substrate and the deformation preventing layer, arranged on the another surface of the substrate, and including at least one layer.
1. A thin film transistor substrate, comprising:
a deformation preventing layer, disposed on a bottom surface of a substrate;
a planarization layer disposed on a top surface of the substrate on an opposite side of the substrate to that of the deformation layer, the planarization layer being of the same material and thickness as that of the deformation preventing layer, the planarization layer and the deformation preventing layer are composed of a single material, and the single material is silicon oxide; and
a thin film transistor arranged on the top surface of the planarization layer having components that include a semiconductor layer, a gate and source electrode and a source and drain electrode,
wherein the substrate is composed of metal that is heat resistant and flexible, and
wherein the only component of the thin film transistor that comes into direct contact with the planarization layer is the semiconductor layer.
2. The substrate of claim 1 , further comprising:
a buffer layer arranged on the planarization layer, wherein the thin film transistor is arranged on the buffer layer, and the deformation preventing layer includes a first layer of the same material and thickness as that of the planarization layer and a second layer formed of the same material and thickness as that the buffer layer.
3. The substrate of claim 1 , further comprising a protective film arranged on the entire area of the top surface of the substrate to cover the thin film transistor.
4. A thin film transistor substrate, comprising:
a deformation preventing layer, disposed on a bottom surface of a substrate;
a planarization layer disposed on a top surface of the substrate on an opposite side of the substrate to that of the deformation layer, the planarization layer being of the same material and thickness as that of the deformation preventing layer, the planarization layer and the deformation preventing layer are composed of a single material, and the single material is silicon oxide;
a thin film transistor arranged on the top surface of the planarization layer having components that include a semiconductor layer, a gate and source electrode and a source and drain electrode; and
a protective film disposed to cover an entire surface of the thin film transistor,
wherein the deformation preventing layer is of the same material and thickness as that of the protective film, and
wherein the only component of the thin film transistor that comes into direct contact with the planarization layer is the semiconductor layer.
5. A thin film transistor substrate, comprising:
a deformation preventing layer, disposed on a bottom surface of a substrate;
a planarization layer disposed on a top surface of the substrate on an opposite side of the substrate to that of the deformation layer, the planarization layer being of the same material and thickness as that of the deformation preventing layer, the planarization layer and the deformation preventing layer are composed of a single material, and the single material is silicon oxide;
a thin film transistor arranged on the top surface of the planarization layer having components that include a semiconductor layer, a gate and source electrode and a source and drain electrode; and
a protective film disposed to cover an entire surface of the thin film transistor,
wherein the substrate is flexible, and
wherein the only component of the thin film transistor that comes into direct contact with the planarization layer is the semiconductor layer.
6. A thin film transistor substrate, comprising:
a deformation preventing layer, disposed on a bottom surface of a substrate, and including at least one layer;
a planarization layer disposed on a top surface of the substrate on an opposite side of the substrate to that of the deformation layer, the planarization layer being of the same material and thickness as that of the deformation preventing layer, the planarization layer and the deformation preventing layer are composed of a single material, and the single material is silicon oxide;
a thin film transistor arranged on the top surface of the planarization layer having components that include a semiconductor layer, a gate and source electrode and a source and drain electrode;
a protective film disposed to cover an entire surface of the thin film transistor; and
a buffer layer arranged on the planarization layer, wherein the thin film transistor is arranged on the buffer layer, and the deformation preventing layer includes a first layer of the same material and thickness as that of the planarization layer, a second layer of the same material and thickness as that of the buffer layer, and a third layer of the same material and thickness as that of the protective film,
wherein the substrate is flexible, and
wherein the only component of the thin film transistor that comes into direct contact with the buffer layer is the semiconductor layer.
7. The substrate of claim 1 , wherein the deformation preventing layer is arranged on the bottom surface of the substrate and includes layers of the same material and thickness as layers formed on the entire area of the top surface of the substrate.
8. The substrate of claim 1 , wherein the substrate comprises a metal substrate.