IP Library Granted Patent US 7,518,268
Granted Patent B2
US 7,518,268 · App. 11/285,716 · Granted Apr 14, 2009

Linear stage including an integrated actuator and associated methods

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Quick Facts
Patent No.
US 7,518,268
App. No.
11/285,716
Granted
Apr 14, 2009
Kind
B2
Abstract

According to one example a linear translation stage is provided. The linear stage includes a first portion (e.g., a base portion) and a second portion (e.g., a stage portion) configured for relative translation with respect to each other. One of the first portion or the second portion has a coil associated therewith and the other of the first portion or the second portion has a magnetic source associated therewith. The magnetic source may include one or more magnets to produce a magnetic field that generally encompasses the coil such that current through the coil causes a force on the coil, thereby causing translation of the first portion relative to the second portion.

Claims (13)

1. An apparatus for moving a stage, the apparatus comprising:

a first portion;

a second portion, the second portion slidably engaged with the first portion, wherein one of the first portion and the second portion includes a stage;

a coil associated with the first portion;

at least one magnetic source associated with the second portion and forming a closed-loop magnetic circuit, the at least one magnetic source for providing a magnetic field in the vicinity of the coil, whereby varying the current through the coil causes translation of the first portion relative to the second portion; and

a center core spatially fixed with respect to the second portion, wherein the coil is disposed around the center core, and the center core is disposed between two endplates fixed to the second portion.

2. The apparatus of claim 1 , wherein the coil and the at least one magnetic source form a voice coil actuator.

3. The apparatus of claim 1 , wherein the at least one magnetic source comprises at least two permanent magnets.

4. The apparatus of claim 1 , wherein the center core includes a ferromagnetic material.

5. The apparatus of claim 1 , wherein the magnetic circuit is formed at least partially through the center core and end plates.

6. The apparatus of claim 1 , wherein the coil is in a fixed spatial relationship with the first portion.

7. The apparatus of claim 1 , further including a sensor positioned to sense relative movement of the first portion to the second portion.

8. An optical system including a translation stage as recited in claim 1 .

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Jul 19, 2013
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 030833/0421 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 8, 2012
From: BOOKHAM TECHNOLOGY PLC
To: NEWPORT CORPORATION
Reel/Frame 027690/0415 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Oct 5, 2011
From: NEWPORT CORPORATION
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 027019/0462 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 10, 2009
From: BOOKHAM TECHNOLOGY
To: NEWPORT CORPORATION
Reel/Frame 023498/0574 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 21, 2007
From: CHOI, DONG H.
To: BOOKHAM TECHNOLOGY PLC (COMPANY NUMBER 02298887)
Reel/Frame 019321/0882 →