Alignment precision enhancement of electronic component process on flexible substrate device and method thereof the same
Alignment precision enhancement of electronic component process on flexible substrate device and method thereof the same is proposed. The process step of a flexible substrate is put on a substrate holder, wherein the flexible substrate is fixed by a polymer tape. A plural of alignment marks is making for lithography process. An unstressed cut is separated the flexible substrate and substrate holder when the electronic component is made.
1. An alignment precision enhancement method of an electronic component process on a flexible substrate comprising the steps of:
placing said flexible substrate on a substrate holder;
completely sticking said flexible substrate to said substrate holder by covering said flexible substrate with a polymer tape and pressing said polymer tape and said flexible substrate towards said substrate holder with a press machine, thereby adhesively fixing said flexible substrate to said substrate holder by said polymer tape;
setting up a plural of alignment mark areas by removing said polymer tape within said alignment mark areas;
depositing or printing a metal or oxide layer on said polymer tape and also on said substrate holder within said alignment mark areas;
making an alignment mark within each of said alignment mark areas;
making an electronic component on said polymer tape located above said flexible substrate; and
separating said flexible substrate, said polymer tape, and said electronic component from said substrate holder by cutting said polymer tape with an unstressed cutting machine.
2. The method according to claim 1 , wherein said substrate holder is made of glass, quartz, metal or ceramic.
3. The method according to claim 1 , wherein said flexible substrate is a polymer substrate, an organic and inorganic mixed substrate, a metal substrate or a glass substrate.
4. The method according to claim 1 , wherein the press machine carries out the adhesion in a roll-to-roll manner.
5. The method according to claim 1 , wherein said polymer tape is made of polymer or an organic/inorganic mixed polymer complex material.
6. The method according to claim 1 , wherein said alignment marks are made by a lithographic process.
7. The method according to claim 1 , wherein the width of said electronic component is smaller than that of said polymer tape and of said flexible substrate.
8. An alignment precision enhancement method of an electronic component process on a flexible substrate comprising the steps of:
making a groove on a substrate holder and placing said flexible substrate in said groove;
completely sticking said flexible substrate to said substrate holder by covering said flexible substrate with a polymer tape and pressing said polymer tape and said flexible substrate towards said substrate holder with a press machine, thereby adhesively fixing said flexible substrate to said substrate holder by said polymer tape;
setting up a plural of alignment mark areas by removing said polymer tape within said alignment mark areas;
depositing or printing a metal or oxide layer on said polymer tape and also on said substrate holder within said alignment mark areas;
making an alignment mark within each of said alignment mark areas;
making an electronic component on said polymer tape located above said flexible substrate; and
separating said flexible substrate, said polymer tape, and said electronic component from said substrate holder by cutting said polymer tape with an unstressed cutting machine.
9. The method according to claim 8 , wherein said substrate holder is made of glass, quartz, metal or ceramic.
10. The method according to claim 8 , wherein said flexible substrate is a polymer substrate, an organic and inorganic mixed substrate, a metal substrate or a glass substrate.
11. The method according to claim 8 , wherein the press machine carries out the adhesion in a roll-to-roll manner.
12. The method according to claim 8 , wherein said polymer tape is made of polymer or an organic/inorganic mixed polymer complex material.
13. The method according to claim 8 , wherein said alignment marks are made by a lithographic process.
14. The method according to claim 8 , wherein the width of said electronic component is smaller than that of said polymer tape and of said flexible substrate.