Granted Patent B2

US 7,812,280 · App. 11/292,691 · Granted Oct 12, 2010

Abstract

Claims (48)

1. A system for micromachining a conical surface comprising:

a platform rotating about a first axis;

a mask having a predetermined pattern comprising a sector of a planar ring corresponding to an unwrapped image of a conical surface of a workpiece, wherein:

the mask being positioned on the platform such that the radial center of the sector is located on the first axis; and

the sector having a width;

a laser configured to project a long line of illumination onto the mask, the line of illumination including a short axis and a long axis, wherein the long axis is substantially equal to or greater than the width of the sector of the planar ring;

a workpiece stage rotating the workpiece about a second axis, wherein the second axis corresponds to the rotational axis of the conical surface of the workpiece.

2. The system according to claim 1 , further comprising an electromagnetic beam source for producing an electromagnetic beam.

3. The system according to claim 1 , wherein the laser is an excimer laser.

4. The system according to claim 1 , further comprising at least one of a beam expander, a beam homogenizer, one or more condenser lenses, one or more field lenses, a turning mirror and one or more projection lenses.

5. The system according to claim 1 , wherein the platform includes an open aperture for receiving the long line of electromagnetic radiation.

6. The system according to claim 1 , further comprising an imaging projection lens.

7. The system according to claim 6 , wherein the projection lens includes a focusing mechanism.

8. The system according to claim 7 , wherein the focusing mechanism comprises a rack and pinion.

9. The system according to claim 8 , further comprising a motor or actuator for rotating the pinion to move the rack.

10. A method for imaging onto a conical surface of a workpiece, comprising:

directing a long line of illumination at a mask, wherein

the mask includes a planar surface of a sector of a ring and a predetermined image thereon,

the ring sector corresponds to an unwrapped area of a conical surface of a workpiece and includes a width; and

the long line of illumination includes a short axis and a long axis, wherein the short axis is substantially equal to or greater than the width of the ring sector;

producing, as a result of the long line of illumination interacting with the mask, an image field projecting on a conical surface of the workpiece;

projecting the image field onto the conical surface of the workpiece;

rotating the mask about a first axis, wherein the first axis comprises the radial center of the sector of the planar ring;

synchronously rotating the workpiece about a second axis, the second axis corresponding to the axis of rotation of the conical surface of the workpiece.

11. The method according to claim 10 , wherein the short axis is oriented perpendicular to the second axis.

12. The method according to claim 10 , wherein the workpiece is tilted with respect with the beam, such that the beam is substantially normally incident to the conical surface of the workpiece.

13. The method according to claim 10 , wherein the long line of illumination is produced by a laser.

14. The method according to claim 11 , wherein the laser comprises an excimer laser.

15. The method according to claim 10 , wherein the mask comprises a magnified image of the conical surface.

16. The method according to claim 10 , wherein the mask and the conical surface are rotated in opposite directions.

17. A system for micromachining a conical surface comprising:

a workpiece stage having a rotational axis for rotating a removably-affixed workpiece comprising a conical surface, wherein the rotational axis corresponds to the rotational axis of the conical surface,

a rotating platform for receiving a long line of laser illumination, the platform having a first axis of rotation;

a mask having a predetermined pattern comprising a sector of a planar ring, wherein the sector comprises an unwrapped image of the conical surface, the mask being positioned on the rotating platform such that the radial center of the sector corresponds to the first axis of rotation, and wherein the sector includes a width;

an excimer laser configured to project a long line of illumination onto the mask, the line of illumination including a short axis and a long axis, wherein the long axis is substantially equal to or greater than the width of the sector;

a homogenizer for homogenizing the laser beam in at least a single direction;

at least one condenser lens;

a turning mirror; and

at least one projection lens.

18. A method for enabling a computer to control equipment for imaging a conical surface of a workpiece stored on a non-transitory computer readable medium, the method comprising:

directing a long line of illumination at a mask, wherein

the mask includes a planar surface of a sector of a ring and a predetermined image thereon, the ring sector corresponds to an unwrapped area of a conical surface of a workpiece and the sector includes a width;

the long line of illumination includes a short axis and a long axis; and

the long axis is substantially equal to or greater than the width of the sector;

producing, as a result of the long line of illumination interacting with the mask, an image field for projection on the conical surface of the workpiece;

projecting the image field onto the conical surface of the workpiece;

rotating the mask about an axis, wherein the axis comprises the center of the ring;

synchronously rotating the workpiece about a second axis, the second axis corresponding to the rotational axis of the conical surface of the workpiece.

Assignments (15)