Reticle-carrying container
View Patent ↗The present invention allows a reticle-carrying container 11 to be fastened in a reticle stocker 2 even if the reticle-carrying container 11 is wrongly oriented. The reticle-carrying container 11 includes an interior with an opening at one end for storing a reticle 12 , a door 14 for covering and blocking the opening, and a seal material 15 for sealing the interior hermetically when the door 14 closes the pod 13 . The reticle-carrying container 11 is provided with two sets of kinematic pin grooves 61 for positioning and fastening the reticle-carrying container 11 , which are turned 180 degrees from each other on the outer surface of the door 14 . Receiving parts 22 for receiving and holding the kinematic pin grooves 61 are arranged in the positions corresponding to the kinematic pin grooves 61 on the outer surface of the pod 13 so that the two sets of kinematic pin grooves 61 can be engaged with the pins in both orientations.
1. A reticle-carrying container comprising:
a pod having an interior opening at one side for storing a reticle;
a door for covering the opening; and
a seal material for sealing the interior hermetically when the door is in place covering the opening of the pod;
wherein two sets of kinematic pin grooves, for positioning and fastening the reticle-carrying containers are provided on the outer surface of the door;
wherein one of the sets of the kinematic pin grooves consists of three pin grooves respectively arranged at the three apexes of an approximately isosceles triangle in a first orientation and the other of the sets of kinematic pin grooves consists of three pin grooves respectively arranged at the three apexes of the approximately isosceles triangle turned 180 degrees from the first orientation to a second orientation.
2. The reticle-carrying container according to claim 1 , wherein receiving parts for receiving and holding the kinematic pin grooves are arranged, in positions corresponding to positions of the kinematic pin grooves on the outer surface of the pod, so that the two sets of kinematic pin grooves can be engaged with the receiving parts on the outer surface of another pod in the first orientation and in the second orientation.
3. The reticle-carrying container according to claim 1 , wherein the pin grooves are protrusions extending from the outer surface of the door to distal ends having recesses therein.