Film formation apparatus
View Patent ↗A film formation apparatus by which a film thickness can be precisely measured and whether the film quality is good or bad can be confirmed in a process of performing film formation according to the aerosol deposition method. The film formation apparatus includes: an aerosol generating unit for generating an aerosol by dispersing a raw material powder by a gas; a holding unit for holding a substrate on which a structure is to be formed; a nozzle for injecting the aerosol generated by the aerosol generating unit toward the substrate; and a measurement unit for measuring an electric potential of a film formation surface on the substrate.
1. A film formation apparatus comprising:
aerosol generating means for generating an aerosol by dispersing a raw material powder by a gas;
holding means for holding a substrate on which a structure is to be formed;
a nozzle for injecting the aerosol generated by said aerosol generating means toward said substrate; and
measuring means for measuring an electric potential of a film formation surface on said substrate.
2. The film formation apparatus according to claim 1 , wherein said measuring means measures the electric potential of the film formation surface on said substrate with reference to a ground potential.
3. The film formation apparatus according to claim 1 , further comprising:
computing means for calculating a deposition height of said structure formed by depositing the aerosol injected from said nozzle on said substrate and/or density of said structure based on the electric potential of the film formation surface measured by the measuring means; and
display means for displaying the deposition height of said structure and/or the density of said structure calculated by said computing means.
4. The film formation apparatus according to claim 1 , further comprising:
control means for controlling a deposition height of said structure and/or a density of said structure based on a measurement result obtained by said measuring means.
5. The film formation apparatus according to claim 4 , wherein said control means changes a flow rate of the aerosol injected from said nozzle based on a measurement result obtained by said measuring means.
6. The film formation apparatus according to claim 4 , wherein said aerosol generating means has a container in which the raw material powder is disposed, and driving means for providing at least one of vibration and predetermined motion to said container; and
said control means controls said driving means based on a measurement result obtained by said measuring means to agitate the raw material powder disposed in said container and change an amount of the raw material powder contained in the aerosol supplied to said nozzle.
7. The film formation apparatus according to claim 4 , wherein said control means controls said holding means based on a measurement result obtained by said measuring means to change a relative speed between said nozzle and said substrate.
8. The film formation apparatus according to claim 1 , wherein said aerosol generating means has a container in which the raw material powder is disposed and gas introducing means for introducing the gas for blowing up and dispersing the raw material powder into said container.
9. The film formation apparatus according to claim 8 , further comprising:
control means for controlling a deposition height of said structure and/or a density of said structure by changing a flow rate of the aerosol injected from said nozzle based on a measurement result obtained by said measuring means.
10. The film formation apparatus according to claim 1 , further comprising:
computing means for obtaining a deposition rate of the structure formed by depositing the aerosol injected from said nozzle on said substrate based on the electric potential of the film formation surface measured by said measuring means.