Thinner composition, method of preparing the same and method of recovering the same
View Patent ↗A thinner composition is provided which includes about 60-80% by weight of propylene glycol mono-alkyl ether having a boiling point of T 1 ° C., about 10-30% by weight of alkyl acetate having a boiling point of T 2 ° C., and about 1-10% by weight of a solvent. The solvent has a boiling point of T 3 ° C. and satisfies the equation (1). T 2 <T 3 <T 2 +30 (1).
1. A thinner composition, comprising:
about 60-80% by weight of propylene glycol mono-alkyl ether having a boiling point of T 1 ° C.;
about 10-30% by weight of alkyl acetate having a boiling point of T 2 ° C.; and
about 1-10% by weight of a solvent, the solvent having a boiling point of T 3 ° C. and satisfying the equation (1):
T 2 <T 3 <T 2 +30 (1).
2. The thinner composition of claim 1 , wherein the alkyl acetate comprises at least one selected from the group consisting of n-propyl acetate, iso-propyl acetate, n-butyl acetate or iso-butyl acetate.
3. The thinner composition of claim 1 , wherein the propylene glycol mono-alkyl ether comprises at least one selected from the group consisting of propylene glycol mono-methyl ether, propylene glycol mono-ethyl ether or propylene glycol mono-propyl ether.
4. The thinner composition of claim 1 , wherein the solvent for the photoresist is propylene glycol mono-alkyl ether acetate.
5. The thinner composition of claim 4 , wherein the propylene glycol mono-alkyl ether acetate comprises at least one selected from the group consisting of propylene glycol mono-methyl ether acetate, propylene glycol mono-ethyl ether acetate or propylene glycol mono-propyl ether acetate.
6. A thinner composition, comprising;
about 60-80% by weight of propylene glycol mono-methyl ether (PGME);
about 10-30% by weight of n-butyl acetate (NBA); and
about 1-10% by weight of propylene glycol mono-methyl ether acetate (PGMEA).
7. The thinner composition of claim 6 , further comprising ethyl ethoxy propionate (EEP) and diethylene glycol dimethyl ether (DMC).