Micro-electromechanical liquid ejection device with a thermal actuator that undergoes rectilinear motion
View Patent ↗A micro-electromechanical liquid ejecting device includes a substrate that defines a liquid inlet channel. A drive circuitry layer is positioned on the substrate. A nozzle chamber structure is positioned on the substrate. The nozzle chamber structure has sidewalls and a roof that define a nozzle chamber in liquid communication with the inlet channel. The roof wall defines a liquid ejection port in liquid communication with the nozzle chamber. A pivot member is positioned in one of the sidewalls and is pivotal with respect to the roof. A liquid ejecting member is fast internally with the pivot member and extends into the nozzle chamber such that displacement of the pivot member results in movement of the liquid ejecting member relative to the roof, thereby ejecting liquid from the liquid ejection port. A rectilinear actuator is connected to the drive circuitry, is configured for rectilinear movement on receipt of a drive signal and is connected to the pivot member to displace the pivot member and thus the liquid ejecting member.
1. A micro-electromechanical liquid ejecting device that comprises
a substrate that defines a liquid inlet channel;
a drive circuitry layer positioned on the substrate;
a nozzle chamber structure positioned on the substrate, the nozzle chamber structure having sidewalls and a roof that define a nozzle chamber in liquid communication with the inlet channel and the roof wall defining a liquid ejection port in liquid communication with the nozzle chamber;
a pivot member positioned in one of the sidewalls and pivotal with respect to the roof;
a liquid ejecting member fast internally with the pivot member and extending into the nozzle chamber such that displacement of the pivot member results in movement of the liquid ejecting member relative to the roof, thereby ejecting liquid from the liquid ejection port; and
a rectilinear actuator connected to the drive circuitry, configured for rectilinear movement on receipt of a drive signal and connected to the pivot member to displace the pivot member and thus the liquid ejecting member.
2. A micro-electromechanical liquid ejecting device as claimed in claim 1 , in which the nozzle chamber structure is rectangular when viewed in plan, with a distal minor sidewall, an opposed proximal minor sidewall and a pair of opposed major sidewalls, the pivot member being positioned in one of the minor sidewalls.
3. A micro-electromechanical liquid ejecting device as claimed in claim 2 , in which a pair of anchors extends from the substrate and the rectilinear actuator includes a resistive heating element having arms extending from respective anchors and connected to the drive circuitry layer via the anchors and a bridging portion interconnecting the arms and fast with the pivot member so that thermal expansion and contraction of the heating element results in reciprocal displacement of the pivot member and thus the liquid ejecting member.
4. A micro-electromechanical liquid ejecting device as claimed in claim 3 , in which the liquid ejecting member is in the form of a rectangular paddle that extends from the proximal minor sidewall to the distal minor sidewall.
5. A micro-electromechanical liquid ejecting device as claimed in claim 4 , in which the inlet channel opens into the nozzle chamber proximate the proximal minor sidewall and the liquid ejection port is positioned proximate the distal minor sidewall to reduce the effects of backflow.
6. A micro-electromechanical liquid ejecting device as claimed in claim 4 , in which a length of the paddle is between twenty and sixty times greater than a distance between a point of attachment of the heater element to the pivot member and a pivot axis of the pivot member to amplify the displacement of the heater element.
7. A micro-electromechanical liquid ejecting device as claimed in claim 2 , in which a length of the nozzle chamber structure is greater than three times a height of the nozzle chamber structure.