Fluid ejection device having an elongate micro-electromechanical actuator
View Patent ↗A micro-electromechanical fluid ejection device includes a substrate that defines a fluid inlet channel and incorporates a wafer and CMOS layers positioned on the wafer. A nozzle chamber sidewall and roof are positioned on the substrate to define a nozzle chamber in fluid communication with the fluid inlet channel and a fluid ejection port in the roof, in fluid communication with the nozzle chamber. An elongate actuator is anchored at a proximal end portion to the substrate to receive electrical drive signals from the CMOS layers and extends through the sidewall. The elongate actuator is configured to be displaced on receipt of said drive signals. A fluid ejecting member is positioned in the nozzle chamber and is fast with a distal end portion of the actuator such that displacement of the actuator results in movement of the fluid ejecting member, thereby ejecting fluid from the fluid ejecting port. The distal end portion of the actuator has an enlarged face. The sidewall extends behind the face to define a slot through which the arm extends so that the face is positioned in the nozzle chamber and the roof defines a slot to accommodate reciprocal movement of the face.
1. A micro-electromechanical fluid ejection device that comprises
a substrate that defines a fluid inlet channel and incorporates a wafer and CMOS layers positioned on the wafer;
a nozzle chamber sidewall and roof positioned on the substrate to define a nozzle chamber in fluid communication with the fluid inlet channel and a fluid ejection port in the roof, in fluid communication with the nozzle chamber;
an elongate actuator anchored at a proximal end portion to the substrate to receive electrical drive signals from the CMOS layers and extending through the sidewall, the elongate actuator being configured to be displaced on receipt of said drive signals;
a fluid ejecting member positioned in the nozzle chamber and fast with a distal end portion of the actuator such that displacement of the actuator results in movement of the fluid ejecting member, thereby ejecting fluid from the fluid ejecting port, wherein
the distal end portion of the actuator has an enlarged face, the sidewall extending behind the face to define a slot through which the arm extends so that the face is positioned in the nozzle chamber and the roof defines a slot to accommodate reciprocal movement of the face.
2. A micro-electromechanical fluid ejection device as claimed in claim 1 , in which an anchor post extends from the substrate and the proximal end portion of the actuator is fast with the actuator post so that the actuator extends into the nozzle chamber spaced from the substrate.
3. A micro-electromechanical fluid ejection device as claimed in claim 2 , in which the actuator includes a heater portion and an actuator arm connected to the heater portion and extending into the nozzle chamber, the heater portion interposed between the anchor post and the actuator arm and connected to the CMOS layers such that heating and subsequent expansion of the heater portion serves to displace the actuator arm and thus the fluid ejecting member.
4. A micro-electromechanical fluid ejection device as claimed in claim 3 , in which the heater portion includes a first layer that defines a heating circuit and a second layer spaced from the first layer such that the first layer is interposed between the substrate and the second layer, the first and second layers being substantially identical.
5. A micro-electromechanical fluid ejection device as claimed in claim 4 , in which a cross-sectional area on the first and second layers decreases moving towards the anchor post so that a resistive heating effect is increased in the region of the anchor post to amplify movement of the actuator.
6. A micro-electromechanical fluid ejection device as claimed in claim 5 , in which the layers each define a slot that tapers outwardly towards the anchor post.
7. A micro-electromechanical fluid ejection device as claimed in claim 6 , in which the actuator arm includes a block-like portion that defines said face and provides structural rigidity to the actuator.