Surface gratings on VCSELs for polarization pinning
View Patent ↗A polarization pinned vertical cavity surface emitting laser (VCSEL). A VCSEL designed to be polarization pinned includes an upper mirror. An active region is connected on the upper mirror. A lower mirror is connected to the active region. A grating layer is deposited to the upper mirror. The grating layer includes a low index of refraction layer formed by deposition on the upper mirror. The grating layer further includes a high index of refraction layer formed by deposition on the low index of refraction layer. A grating is formed into the grating layer.
1. A vertical cavity surface emitting laser (VCSEL), the VCSEL comprising:
an upper mirror;
an active region coupled to the upper mirror, the active region having one or more quantum wells configured to generate light by stimulated emission;
an aperture configured to direct a bias current through the active region;
a lower mirror coupled to the active region;
a light transmissive grating layer comprising:
a low index of refraction layer formed by deposition on the upper mirror; and
a high index of refraction layer formed by deposition on the low index of refraction layer, the high index of refraction having an index of refraction that is 0.3 or greater than the index of refraction for the low index of refraction layer; and
a grating formed into the grating layer above the aperture, the grating configured to pin polarization of light emitted from the active region.
2. The VCSEL of claim 1 , wherein the low index of refraction layer and the high index of refraction layer are thin layers.
3. The VCSEL of claim 1 , wherein the grating has a duty cycle less than about 50%.
4. The VCSEL of claim 1 , wherein the low index of refraction layer acts as a stop-etch when forming the grating into the high index of refraction layer.
5. The VCSEL of claim 1 , wherein the grating is formed into both the high index of refraction layer and the low index of refraction layer.
6. The VCSEL of claim 1 , wherein at least a portion of the low index of refraction layer is not etched so as to provide passivation to the surface of the top mirror.
7. The VCSEL of claim 1 , wherein the top mirror is a semiconductor mirror.
8. The VCSEL of claim 1 , wherein the low index of refraction layer has an index of refraction between 1.2 and 2.5.
9. The VCSEL of claim 1 , wherein the high index of refraction layer has an index of refraction between 1.8 and 5.
10. The VCSEL of claim 1 , wherein the low index of refraction layer has an optical thickness of between 0.04 and 1.8 wave.
11. The VCSEL of claim 1 , wherein the high index of refraction layer has an optical thickness of between 0.15 and 0.5 wave.
12. The VCSEL of claim 1 , wherein the low index of refraction layer comprise SiO 2 .
13. The VCSEL of claim 1 , wherein the high index of refraction layer comprises at least one of Si and Si 3 N 4 .
14. The VCSEL of claim 1 , wherein the grating layer is designed at a thickness to act as an anti reflective coating outside of a region comprising the grating.
15. A vertical cavity surface emitting laser (VCSEL), the VCSEL comprising:
an upper mirror;
an active region coupled to the upper mirror, the active region having one or more quantum wells configured to generate light by stimulated emission;
an aperture configured to direct bias current through the active region;
a lower mirror coupled to the active region;
a light transmissive grating layer deposited on the upper mirror, the grating layer including a high index of refraction layer deposited on a low index of refraction material, the high index of refraction having an index of refraction that is 0.3 or greater than the index of refraction for the low index of refraction layer ; and
a grating formed into the grating layer above the aperture, the grating layer having a duty cycle below 50% and configured to pin polarization of light emitted from the active region.
16. The VCSEL of claim 15 , wherein the grating layer comprises a low index of refraction layer coupled to the upper mirror and a high index of refraction layer coupled to the low index of refraction layer.
17. The VCSEL of claim 16 , wherein the low index of refraction layer and high index of refraction layer are thin layers.
18. The VCSEL of claim 1 , wherein the deposited high index of refraction layer and/or the deposited low index of refraction layer is not a grown layer.