Apparatus for inspecting alignment film and method for fabricating liquid crystal display device using the same
View Patent ↗An apparatus for inspecting an alignment film and a method for fabricating a liquid crystal display device using the same are disclosed. By changing a spraying structure of a steam inspecting unit to check whether an alignment film is defective or not, a water splash phenomenon can be prevented and spraying can be performed uniformly on a large-scale glass. The apparatus for inspecting an alignment film comprises a first steam generating unit for generating first steam; a second steam generating unit for generating second steam by using the first steam as a heat source; and a steam spraying unit for spraying the second steam onto a substrate of a substrate to inspect an alignment film formed on the substrate.
1. A method for fabricating a liquid crystal display (LCD) device comprising:
performing an array process on a first substrate and a color filter process on a second substrate;
forming an alignment film on a surface of the first and second substrates;
inspecting the alignment film formed on the first and second substrates by using an alignment film inspecting apparatus comprising a first steam generating unit for generating first steam, a second steam generating unit for generating second steam by using the first steam as a heat source and a steam spraying unit for spraying the second steam on the surface of the first and second substrates,
wherein the steam spraying unit comprises a steam/moisture separator for separating moisture contained in the second steam and a spray pipe for spraying the second steam from which moisture has been removed through the steam/moisture separator to glass;
attaching the first and second substrates on which the inspecting the alignment film has been performed; and
cutting the attached substrates into a plurality of unit liquid crystal display panels.
2. The method of claim 1 , wherein the steam spraying unit sprays the second steam to a surface of the first and second substrates in the range of 10˜100 cm between the steam spraying unit and the first and second substrates.
3. The method of claim 1 , further comprising:
forming a liquid crystal layer between the first and second substrates.
4. The method of claim 1 , wherein the step of inspecting the alignment film comprises:
a first inspecting process for checking whether there is a blot, a ling pattern or a pin hole on the surface of the alignment film after the alignment film is formed on the first and second substrates.
5. The method of claim 1 , further comprising:
performing rubbing on the first and second substrates on which the alignment film has been formed.
6. The method of claim 5 , wherein the step of inspecting the alignment film comprises:
a second inspecting process for checking uniformity of the surface of the rubbed alignment film and whether there is a scratch thereon after rubbing is performed on the alignment film-formed first and second substrates.
7. The method of claim 1 , wherein the first steam generating unit comprises:
a water supply pump for supplying deionized (DI) water; and
a heat exchange tank for changing the supplied DI to a first steam.
8. The method of claim 1 , wherein the second steam generating unit comprises:
a water supply tank for storing DI water;
a water supply pump for supplying DI water stored in the water supply tank; and
a heat exchanger for changing the supplied DI water to second steam by using the first steam as a heat source.