Nonuniform ion implantation apparatus and method using a wide beam
View Patent ↗A nonuniform ion implantation apparatus comprises a wide ion beam generator for generating a wide ion beam including a plurality of wide ion beams irradiated on at least two sections among a plurality of sections into which a wafer is divided, and a wafer drive unit for vertically reciprocating the wafer while the wide ion beam generated by the wide ion beam generator is irradiated on the wafer. At least one of the wide ion beams has a dose different from that of at least another wide ion beam.
1. A nonuniform ion implantation apparatus comprising:
a wide ion beam generator, including:
an upper magnetron assembly comprising a first upper magnetron assembly and a second upper magnetron assembly, and
a lower magnetron assembly comprising a first lower magnetron assembly and a second lower magnetron assembly disposed below the first upper magnetron assembly and the second upper magnetron assembly, such that the first lower magnetron assembly and the second lower magnetron assembly are vertically spaced a predetermined distance from the first upper magnetron assembly and the second upper magnetron assembly,
the upper and lower magnetron assemblies configured to generate a plurality of wide ion beams comprising at least a first wide ion beam generated between the first upper magnetron assembly and the first lower magnetron assembly and a second wide ion beam generated between the second upper magnetron assembly and the second lower magnetron assembly; and
a wafer drive unit for moving a wafer on which the wide ion beam is irradiated by the wide ion beam generator.
2. The apparatus as set forth in claim 1 further comprising:
an ion beam source for generating an ion beam; and
a magnetic pole assembly for magnifying and reducing an ion beam emitted from an ion beam source.
3. The apparatus as set forth in claim 1 wherein
each of the first upper magnetron assembly, second upper magnetron assembly, first lower magnetron assembly, and second lower magnetron assembly comprise a plurality of magnetron elements.
4. The apparatus as set forth in claim 3 , wherein the number of magnetron elements in the first upper magnetron assembly and the first lower magnetron assembly is equal to the number of magnetron elements in the second upper magnetron assembly and the second lower magnetron assembly.
5. The apparatus as set forth in claim 3 , wherein the number of magnetron elements in the first upper magnetron assembly and the first lower magnetron assembly is not equal to the number of magnetron elements in the second upper magnetron assembly and second lower magnetron assembly.
6. The apparatus as set forth in claim 3 , wherein the voltage applied to the first upper magnetron assembly and the first lower magnetron assembly is not equal to the voltage applied to the second upper magnetron assembly and the second lower magnetron assembly.