Liquid crystal display device and fabrication method thereof
View Patent ↗A method for fabricating a liquid crystal display includes providing a first substrate having a pixel part and a driving circuit part, forming a gate electrode in the pixel part of the first substrate, forming a first insulation film, a first amorphous silicon thin film and a second amorphous silicon thin film on the first substrate, forming a first conductive film on the first substrate, having the first insulation film, the first amorphous silicon thin film, and the second amorphous silicon thin film, selectively patterning the first conductive film, the second amorphous silicon thin film and the first amorphous silicon thin film to form an active pattern in each of the pixel part and the driving circuit part of the first substrate and source and drain electrodes, crystallizing the first amorphous silicon thin film constituting the active pattern of the driving circuit part, forming a second insulation film on the first substrate, forming a pixel electrode in the pixel part and a gate electrode in the driving circuit part, and attaching the first substrate to a second substrate.
1. A liquid crystal display device comprising:
a first substrate divided into a pixel part and a driving circuit part;
an amorphous silicon thin film transistor formed on the pixel part of the first substrate having a gate electrode, an active pattern, source and drain electrodes and a pixel electrode;
a polycrystalline silicon thin film transistor formed in the driving circuit part of the first substrate and having an active pattern, source and drain electrodes and a gate electrode formed on the same layers respectively corresponding to the active pattern, the source and drain electrodes and the pixel electrode of the amorphous silicon thin film transistor; and
a second substrate, a color filter substrate, attached to the first substrate in a facing manner.
2. The device of claim 1 , wherein the source and drain electrodes of the driving circuit part are made of a first conductive material, which is substantially the same as that of the source and drain electrodes of the pixel part.
3. The device of claim 2 , wherein the first conductive material is one of aluminum, an aluminum alloy, tungsten, copper, chromium and molybdenum.
4. The device of claim 1 , wherein the gate electrode of the driving circuit part is made of a second conductive material which is substantially the same as that of the pixel electrode of the pixel part.
5. The device of claim 4 , wherein the second conductive material is one of indium-tin-oxide and indium-zinc-oxide.
6. The device of claim 1 , further comprising:
a first insulation film formed between the gate electrode and the active pattern of the pixel part and used as a gate insulation film of the thin film transistor in the pixel part.
7. The device of claim 6 , further comprising:
the first insulation film as a buffer layer formed at a lower portion of the active pattern of the driving circuit part.
8. The device of claim 1 , further comprising:
an ohmic-contact layer formed of an n+ amorphous silicon thin film and connecting regions of the active patterns to source and drain electrodes of the pixel part and the driving circuit part.
9. The device of claim 8 , wherein the n+ amorphous silicon thin film transistor of the driving circuit part is activated through a selective laser irradiation.
10. The device of claim 1 , further comprising:
a second insulation film formed between the source and drain electrodes and the pixel electrode of the pixel part.
11. The device of claim 9 , further comprising:
a driving circuit part gate insulation film formed between the active pattern and the gate electrode of the driving circuit part using the second insulation film.
12. The device of claim 4 , further comprising:
a first connection electrode connected with the source electrode of the driving circuit part; and
a second connection electrode exposed by being connected with the drain electrode of the driving circuit part,
the first and second connection electrodes being formed on the same layer on which the pixel electrode is formed.
13. The device of claim 1 , wherein the active pattern of the pixel part is formed of the amorphous silicon thin film and the active pattern of the driving circuit part is formed of the polycrystalline silicon thin film obtained by crystallizing the amorphous silicon thin film.
14. A liquid crystal display device comprising:
an amorphous silicon thin film transistor formed on a first region of a first substrate and comprised of a gate electrode, an active pattern, source and drain electrodes and a pixel electrode;
a polycrystalline silicon thin film transistor formed on a second region of the first substrate and comprised of an active pattern, source and drain electrodes and a gate electrode formed on the same layer respectively corresponding to the active pattern, the source and drain electrodes and the pixel electrode of the first region; and
a second substrate, a color filter substrate, attached to the first substrate in a facing manner.
15. The device of claim 14 , wherein the first region is a pixel part and the second region is a driving circuit part.
16. The device of claim 14 , wherein the first region is a third region of the pixel part and the second region is a remaining fourth region of the pixel part and the driving circuit part.