Oscillating micro-mechanical sensor of angular velocity

1. An oscillating, micro-mechanical sensor of angular velocity, said sensor comprising at least one seismic mass ( 1 ), ( 9 ), ( 10 ), ( 20 ), ( 30 ), ( 31 ), ( 45 ), ( 46 ) and associated movable electrode attached to a body of the sensor component at support areas such, that

in the sensor of angular velocity, a primary motion, which has to be generated, is an angular oscillation of the at least one seismic mass ( 1 ), ( 9 ), ( 10 ), ( 20 ), ( 30 ), ( 31 ), ( 45 ), ( 46 ) and the associated movable electrode about an axis perpendicular to the plane of the disk formed by the masses,

in addition to the primary motion, the seismic mass ( 1 ), ( 9 ), ( 10 ), ( 20 ), ( 30 ), ( 31 ), ( 45 ), ( 46 ) possesses a second degree of freedom in relation to a detection axis perpendicular to the primary motion, and that

in association with at least one edge of the seismic mass ( 1 ), ( 9 ), ( 10 ), ( 20 ), ( 30 ), ( 31 ), ( 45 ), ( 46 ), at least one pair of electrodes is provided, which the pair of electrodes together with the surface of the mass ( 1 ), ( 9 ), ( 10 ), ( 20 ), ( 30 ), ( 31 ), ( 45 ), ( 46 ) forms two capacitances such, that, as a function of an angle of rotation of the primary motion of the mass ( 1 ), ( 9 ), ( 10 ), ( 20 ), ( 30 ), ( 31 ), ( 45 ), ( 46 ), the capacitance of one pair of electrodes will increase and the capacitance of the other pair of electrodes will decrease.

2. Sensor of angular velocity according to claim 1 , wherein the electrodes of the pair of electrodes are positioned equidistant on both sides of a detection axis.

3. Sensor of angular velocity according to claim 1 , wherein a voltage of the same magnitude in relation to the potential of the mass ( 1 ), ( 9 ), ( 10 ), ( 20 ), ( 30 ), ( 31 ), ( 45 ), ( 46 ) is connected to both electrodes of the pair of electrodes.

4. Sensor of angular velocity according to claim 1 , wherein the sensor further comprises:

a seismic mass and an associated movable electrode ( 1 ), which is attached to a body of a sensor component at an attachment spot ( 2 ),

bending springs ( 3 )-( 6 ) for the primary motion, connecting the attachment spot ( 2 ) to a surrounding stiff auxiliary structure and restricting the primary motion of the mass ( 1 ) essentially to an angular oscillation about the axis perpendicular to the plane of the disk, and

torsion springs ( 7 ), ( 8 ) for a detection motion, conveying the primary motion to the seismic mass ( 1 ) and simultaneously giving the mass ( 1 ) a second degree of freedom for the detection motion, which the detection motion is a rotary oscillation about a detection axis perpendicular to the axis of the primary motion.

5. Sensor of angular velocity according to claim 1 , wherein the sensor further comprises:

two seismic masses ( 9 ), ( 10 ) and associated movable electrodes ( 9 ), ( 10 ), attached to a body of a sensor component at two attachment spots ( 11 ), ( 12 ),

bending springs ( 13 ), ( 14 ) for the primary motion connecting the attachment spots ( 11 ), ( 12 ) to surrounding stiff auxiliary structures or directly to the seismic masses ( 9 ), ( 10 ),

torsion springs ( 15 )-( 18 ) for the detection motion, and

a bending spring ( 19 ) connecting the seismic masses ( 9 ), ( 10 ) to each other, such that the resonators are connected in such a way, that both the primary motion of the masses ( 9 ), ( 10 ) and a detection motion are opposite phase motions of the two movable electrodes ( 9 ), ( 10 ).

6. Sensor of angular velocity according to claim 4 , wherein the oscillation caused by an external angular velocity is detected capacitively by means of electrodes located above or underneath the seismic masses ( 1 ), ( 9 ), ( 10 ).

7. Sensor of angular velocity according to claim 6 , wherein the electrodes located above or underneath the seismic masses are grown onto an inner surface of a wafer hermetically closing the sensor structure.

8. Sensor of angular velocity according to claim 1 , wherein the sensor of angular velocity is a sensor of angular velocity measuring angular velocity in relation to two axes, the sensor comprising

a seismic mass and an associated movable electrode ( 20 ) attached to a body of the sensor component at an attachment spot ( 21 ),

bending springs ( 22 )-( 25 ) for the primary motion, connecting the attachment spot ( 21 ) to a surrounding stiff auxiliary structure and restricting the primary motion of the mass ( 20 ) essentially to an angular oscillation about the axis perpendicular to the plane of a disk,

torsion springs ( 26 ), ( 27 ) for a detection motion in a first direction conveying the primary motion to the seismic mass ( 20 ) and simultaneously giving the mass ( 20 ) a degree of freedom for the detection motion in the first direction, which the detection motion is a rotary oscillation essentially about a first detection axis perpendicular to the axis of the primary motion, and

torsion springs ( 28 ), ( 29 ) for a detection motion in a second direction conveying the primary motion to the seismic mass ( 20 ) and simultaneously giving the mass ( 20 ) a degree of freedom for the detection motion in the second direction, which the detection motion is a rotary oscillation essentially about a second detection axis perpendicular to the axis of the primary motion and to the first detection axis.

9. Sensor of angular velocity according to claim 1 , wherein the sensor of angular velocity is a sensor of angular velocity measuring angular velocity in relation to two axes, the sensor comprising

two seismic masses and associated movable electrodes ( 30 ), ( 31 ) attached to a body of a sensor component at two attachment spots ( 32 ), ( 33 ),

bending springs ( 34 ), ( 35 ) for the primary motion connecting the attachment spots ( 32 ), ( 33 ) to surrounding stiff auxiliary structures,

torsion springs ( 36 )-( 39 ) for a detection motion in a first direction, conveying the primary motion to the seismic masses ( 30 ), ( 31 ) and simultaneously giving the masses ( 30 ), ( 31 ) a degree of freedom for the detection motion in the first direction,

torsion springs ( 40 )-( 43 ) for a detection motion in a second direction, conveying the primary motion to the seismic masses ( 30 ), ( 31 ) and simultaneously giving the masses mass ( 30 ), ( 31 ) a degree of freedom for the detection motion in the second direction, and

a bending spring ( 44 ) connecting the seismic masses ( 30 ), ( 31 ) to each other.

10. Sensor of angular velocity according to claim 4 , wherein attachment spots ( 2 ), ( 11 ), ( 12 ), ( 21 ), ( 32 ), ( 33 ) are joined in an anodic manner to the wafer hermetically closing a sensor structure.

11. Sensor of angular velocity according to claim 4 , wherein attachment spots ( 2 ), ( 11 ), ( 12 ), ( 21 ), ( 32 ), ( 33 ) are joined by means of a fusion joint to the wafer hermetically closing a sensor structure.