Organic thin film transistor comprising device insulation film and method of manufacturing the same
View Patent ↗An organic thin film transistor (OTFT) includes a substrate, a gate electrode formed on the transparent substrate, a gate insulation film formed on the gate electrode, a source electrode and a drain electrode formed spaced apart from each other on the gate insulation film, a device insulation film formed over the gate, source, and drain electrodes, and an organic semiconductor film formed on the device insulation film.
1. An organic thin film transistor (OTFT), comprising:
a transparent substrate;
a gate electrode formed on the substrate;
a gate insulation film formed on the gate electrode;
a source electrode and a drain electrode formed spaced apart from each other on the gate insulation film;
a device insulation film directly formed on an exposed surface of the gate insulation film and entire upper surfaces of the source and drain electrodes, wherein the device insulation film includes one of a silicon oxide, silicon nitride, titania, and alumina, and wherein a thickness of the device insulation film ranges from about 10 Å (angstroms) to about 900 Å (angstroms); and
an organic semiconductor film directly formed on the entire upper surface of the device insulation film.
2. The OTFT according to claim 1 , wherein the device insulation film is formed by one of a chemical vapor deposition process or an atomic layer deposition process.
3. A method of fabricating an organic thin film transistor (OTFT), comprising the steps of:
forming a gate electrode on a transparent substrate;
forming a gate insulation film on the gate electrode;
forming a source electrode and a drain electrode spaced apart from each other on the gate insulation film;
directly forming a device insulation film on an exposed surface of the gate insulation film and entire upper surfaces of the source and drain electrodes, wherein the device insulation film includes one of a silicon oxide, silicon nitride, titania, and alumina, and wherein a thickness of the device insulation film ranges from about 10 Å (angstroms) to about 900 Å (angstroms); and
directly forming an organic semiconductor film on the entire upper surface of the device insulation film.
4. The method according to claim 3 , wherein the device insulation film is formed by either a chemical vapor deposition process or an atomic layer deposition process.
5. A method of fabricating an organic thin film transistor (OTFT), comprising the steps of:
forming a gate electrode on a transparent substrate;
forming a gate insulation film on the gate electrode;
forming a source electrode and a drain electrode spaced apart from each other on the gate insulation film;
directly forming a device insulation film on an exposed surface of the gate insulation film and entire upper surfaces of the source and drain electrodes to enhance a carrier mobility by either a chemical vapor deposition process or an atomic layer deposition process, wherein the device insulation film includes a benzocyclobutene, and wherein a thickness of the device insulation film ranges from about 10 Å (angstroms) to about 900 Å (angstroms); and
directly forming an organic semiconductor film on the entire upper surface of the device insulation film.
6. The method according to claim 5 , further comprising the step of rubbing the device insulation film in one direction after forming the device insulation film.
7. The method according to claim 6 , wherein the device insulation film is rubbed in a direction perpendicular to the source electrode and the drain electrode.