IP Library Granted Patent US 7,753,674
Granted Patent B2
US 7,753,674 · App. 11/320,210 · Granted Jul 13, 2010

Apparatus and method for fabricating flat panel display device

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Quick Facts
Patent No.
US 7,753,674
App. No.
11/320,210
Granted
Jul 13, 2010
Kind
B2
Abstract

A method and apparatus for fabricating a flat panel display device is disclosed. A thin film is patterned in a patterning process using a soft mold without using a photo process. A thin film layer and a resist are sequentially formed on a substrate. A designated resist pattern is formed by applying pressure to the resist using a soft mold. The resist has a dipole moment μ value equal to or higher than 2(D), or has a solubility parameter value lower than 6 (cal/cm 3 ) 1/2 or higher than 11 (cal/cm 3 ) 1/2 .

Claims (9)

1. An apparatus for fabricating a flat panel display device, comprising:

a resist formed on a substrate,

a soft mold having a groove and a projected surface, for forming a designated resist pattern by moving the resist to the groove with a pressure applied after contacting the resist to the projected surface,

wherein the resist has a dipole moment μ value equal to or higher than 2(D), or has a solubility parameter value lower than 6 (cal/cm 3 ) 1/2 or higher than 11 (cal/cm 3 ) 1/2 such that a solubility parameter difference between the soft mold and the resist is large and absorption of the resist into the soft mold is limited,

wherein the soft mold is PDMS (polydimethylsiloxane), and a solubility parameter value of the PDMS is about 7.3 (cal/cm 3 ) 1/2 .

2. The apparatus according to claim 1 , wherein the resist further comprises at least one of an adhesive promoter and a silane coupling agent.

3. The apparatus according to claim 1 , wherein the flat panel display device comprises one of a liquid crystal display LCD, a field emission display FED, a plasma display device PDP, or an electroluminescence device EL.

4. The apparatus according to claim 1 , wherein the resist includes at least one of EGDMA (ethylene glycol dimetharcylate), HPA (hydroxypropyl arcylate), or DGDMA (diethylene glycol dimetharcylate).

5. The apparatus according to claim 4 , wherein the at least one of the EGDMA, HPA, or DGDMA is about 20˜70% of the whole composition of the resist.

Assignments (2)
CHANGE OF NAME Recorded Nov 18, 2008
From: LG PHILLIPS LCD CO., LTD.
To: LG DISPLAY CO., LTD.
Reel/Frame 021853/0414 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 27, 2005
From: KIM, JIN WUK
To: LG. PHILIPS LCD CO., LTD.
Reel/Frame 017430/0649 →