Semiconductor device having a reductant layer and manufacturing method thereof
View Patent ↗A semiconductor device includes an inter-metal dielectric (IMD) formed on a substrate and having at least one via hole, a via hole formed by filling the via hole with a first metal, a reductant layer formed on the via plug and the inter-metal dielectric to a predetermined thickness, and a metal line layer formed by depositing a second metal on the reductant layer.
1. A method of manufacturing a semiconductor device, comprising:
preparing a substrate where an inter-metal dielectric is formed on the top thereof;
etching the inter-metal dielectric to form a via hole exposing a portion of the substrate;
forming a via plug by filling the via hole with a first metal;
forming a reductant layer by coating a layer of hafnium (Hf) on the via plug to a predetermined thickness; and
forming a metal line layer by depositing a second metal on the reductant layer and the inter-metal dielectric.
2. The method according to claim 1 , further comprising forming a barrier layer on the inter-metal dielectric and the exposed portion of the substrate after the formation of the via hole.
3. The method according to claim 1 , further comprising planarizing an upper portion of the via plug and an upper portion of the inter-metal dielectric after the formation of the via plug.
4. The method according to claim 1 , further comprising performing a thermal treatment in a nitrogen ambient after the formation of the metal line layer.
5. The method according to claim 1 , wherein the layer of hafnium has a reducing power higher than that of the first metal.
6. The method according to claim 1 , wherein the layer of hafnium is formed by using a chemical vapor deposition (CVD) process.
7. The method according to claim 1 , wherein the via plug is formed by depositing the first metal using a CVD process.
8. The method according to claim 1 , wherein the metal line layer is formed by depositing the second metal using a CVD process.
9. A method of manufacturing a semiconductor device, comprising:
preparing a substrate where an inter-metal dielectric is formed on the top thereof;
etching the inter-metal dielectric to form a via hole exposing a portion of the substrate;
forming a via plug by selectively depositing a first metal into the via hole;
forming a reductant layer by coating a layer of hafnium on the via plug to a predetermined thickness;
forming a metal line layer by non-selectively depositing a second metal on the reductant layer and the inter-metal dielectric; and
monocrystallizing the first metal and the second metal in a direction identical to a crystallization direction of the substrate by heating the substrate at predetermined pressure and temperature for a predetermined time.
10. The method according to claim 9 , further comprising forming a barrier layer on the inter-metal dielectric and the exposed portion of the substrate after the formation of the via hole.