Flash memory device and fabricating method thereof
View Patent ↗A flash memory device includes a floating gate formed on a substrate, sidewall gates formed on sidewalls of the floating gate, an interlayer insulating layer formed the floating gate and the sidewall gates, and a control gate formed on the interlayer insulating layer. The fabricating method of a flash memory device includes forming a floating gate on a substrate, forming sidewall gates at sidewalls of the floating gate, forming an interlayer insulating layer on the floating gate and the sidewall gates, and forming a control gate on the interlayer insulating layer.
1. A flash memory device comprising:
a floating gate formed on a substrate;
first sidewall gates formed on sidewalls of the floating gate;
an interlayer insulating layer formed on the floating gate and the sidewall gates;
a control gate formed on the interlayer insulating layer;
trench insulating layers formed in the substrate to thereby define an active region therebetween;
a selection gate formed on the trench insulating layers; and
second sidewall pates formed at sidewalls of the selection gate.
2. The flash memory device according to claim 1 , wherein the substrate is formed of silicon.
3. The flash memory device according to claim 1 , wherein the first and second sidewall gates are formed of polysilicon.
4. The flash memory device according to claim 1 , wherein the interlayer insulating layer is formed of an oxide/nitride/oxide (ONO) layer.
5. The flash memory device according to claim 1 , wherein the first sidewall gates prevent the edge region of the floating gate from being protruded sharply to reduce the probability of electrons from moving from an edge portion of the floating gate to the control gate.
6. The flash memory according to claim 5 , wherein the edge portion of the floating gate is not sharp but relatively smooth.
7. A fabricating method of a flash memory device, comprising:
forming trench insulating layers in a substrate for defining an active region;
forming a floating gate on the substrate;
forming a selection gate on the trench insulating layers;
forming sidewall gates at sidewalls of the floating gate and sidewalls of the selection gate;
forming an interlayer insulating layer on the floating gate and the sidewall gates; and
forming a control gate on the interlayer insulating layer.
8. The fabricating method according to claim 7 , wherein the substrate is formed of silicon.
9. The fabricating method according to claim 7 , wherein the sidewall gates are formed of polysilicon.
10. The fabricating method according to claim 7 , wherein the interlayer insulating layer is formed of an oxide/nitride/oxide (ONO) layer.
11. The fabricating method according to claim 7 , wherein the sidewall gates prevent the edge region of the floating gate from being protruded sharply to reduce the probability of electrons from moving from an edge portion of the floating gate to the control gate.
12. The fabricating method according to claim 7 , wherein the forming of the sidewall gate includes:
forming a polysilicon layer on the floating gate;
forming a patterned mask on the polysilicon layer; and
forming the sidewall gates by an etching process using the patterned mask.
13. The fabricating method according to claim 11 , wherein the edge portion of the floating gate is not sharp but relatively smooth.
14. The fabricating method according to claim 12 , wherein the patterned mask is formed of a photoresist layer.