Solid-state image pickup device and manufacturing method for the same
View Patent ↗A solid-state image pickup device includes, in a substrate, a plurality of photoelectric conversion regions for subjecting incoming light to photoelectric conversion, a reading gate for reading a signal charge from the photoelectric conversion regions, and a transfer register (vertical register) for transferring the signal charge read by the reading gate. Therein, a groove is formed on the surface side of the substrate, and the transfer register and the reading gate are formed at the bottom part of the groove. With such a structure, in the solid-state image pickup device, reduction can be achieved for the smear characteristics, a reading voltage, noise, and others.
1. A solid-state image pickup device including, in a substrate, a plurality of photoelectric conversion regions for subjecting incoming light to photoelectric conversion, and an electrode for reading a signal charge from the photoelectric conversion regions, wherein
a groove is formed on a surface of the substrate, and the electrode is formed at a bottom part of the groove and a light-shielding film is formed to fill at least at a gap between the electrode and a sidewall section of the groove.
2. The solid-state image pickup device according to claim 1 , wherein the light-shielding film is applied with a pulse voltage.
3. The solid-state image pickup device according to claim 1 , wherein the light-shielding film is applied with a direct voltage.
4. The solid-state image pickup device according to claim 1 , wherein including the substrate from the bottom part of the groove to one sidewall section of the groove, the electrode is formed to be placed across the substrate locating upper to the sidewall.
5. The solid-state image pickup device according to claim 1 , wherein the groove has a lattice structure.
6. The solid-state image pickup device according to claim 1 , wherein the photoelectric conversion region is formed below the light-shielding film.
7. The solid-state image pickup device according to claim 1 , further comprising a transfer register formed in the groove.
8. The solid-state image pickup device according to claim 7 , wherein
a pixel separation region for partitioning each of the photoelectric conversion regions is formed below the groove in the substrate.
9. The solid-state image pickup device according to claim 8 , wherein
the part of the electrode formed in the direction of the transfer register is formed, in the groove, at least partially on the pixel separation region, and on the transfer register and the reading gate.
10. The solid-state image pickup device according to claim 8 , wherein
the part of the electrode formed in the direction of the transfer register is formed, in the groove, at least partially on the pixel separation region, and partially on the transfer register and the reading gate.
11. The solid-state image pickup device according to claim 1 , wherein a sidewall section of the groove is structured by a slope plane.
12. The solid-state image pickup device according to claim 11 , wherein the slope plane has a substrate of a p-type layer.
13. The solid-state image pickup device according to claim 1 , wherein the groove is plurally segmented.
14. The solid-state image pickup device according to claim 13 , wherein the groove is bi-segmented,
a sidewall section of a first segment of the groove is included in the electrode, and
a sidewall section of a second segment of the groove is at least partially included in the other electrode.
15. A solid-state image pickup apparatus, comprising:
a solid-state image pickup device including, in a substrate, a plurality of photoelectric conversion regions, for subjecting incoming light to photoelectric conversion, and an electrode for reading a signal charge from the photoelectric conversion regions, an optical system for directing the incoming light to the solid-state image pickup device, wherein
the solid-state image pickup device has a groove formed on a surface of the substrate, and the electrode is formed at a bottom part of the groove.