Vacuum evaporator
View Patent ↗A vacuum evaporator including a vacuum chamber and a source arranged in the vacuum chamber to supply a deposition material to a substrate on which a layer is formed. A crystal sensor measures a deposition speed of the deposition material. The crystal sensor includes an insert having a hole, and the insert is arranged in front of the crystal sensor.
1. A vacuum evaporator, comprising:
a vacuum chamber;
a source arranged at a bottom of the vacuum chamber, to receive a deposition material therein, the source comprising a heater at an exterior thereof;
a substrate fixture to fix a substrate over the source, the deposition material from the source for deposition on the substrate;
a crystal sensor arranged at a side of the substrate; and
an insert having a hole in front of the crystal sensor.
2. The vacuum evaporator of claim 1 , wherein the deposition material is one of an organic material and an inorganic material.
3. The vacuum evaporator of claim 1 , wherein two inserts are arranged in front of the crystal sensor.
4. The vacuum evaporator of claim 1 , wherein the hole has a diameter in a range of 5 mm to 13 mm.
5. The vacuum evaporator of claim 4 , wherein the hole has a diameter of 8 mm.
6. The vacuum evaporator of claim 4 , wherein the hole has a diameter of 13 mm.
7. The vacuum evaporator of claim 1 , wherein the insert is fixed in front of the crystal sensor by a supporter.
8. The vacuum evaporator of claim 1 , wherein the hole is arranged substantially in a center of the insert.
9. A vacuum evaporator, comprising:
a vacuum chamber;
a source arranged in the vacuum chamber to supply a deposition material to a substrate;
a crystal sensor to measure a deposition speed of the deposition material; and
an insert having a hole, the insert being arranged in front of the crystal sensor.
10. The vacuum evaporator of claim 9 , wherein the deposition material is one of an organic material and an inorganic material.
11. The vacuum evaporator of claim 9 , wherein two inserts are arranged in front of the crystal sensor.
12. The vacuum evaporator of claim 9 , wherein the hole has a diameter in a range of 5 mm to 13 mm.
13. The vacuum evaporator of claim 12 , wherein the hole has a diameter of 8 mm to 13 mm.
14. The vacuum evaporator of claim 9 , wherein the insert is fixed in front of the crystal sensor by a supporter.
15. The vacuum evaporator of claim 9 , wherein the hole is arranged substantially in a center of the insert.
16. The vacuum evaporator of claim 15 , wherein the source is arranged at a bottom of the vacuum chamber, the substrate is arranged over the source, and the crystal sensor is arranged at a side of the substrate.
17. The vacuum evaporator of claim 16 , wherein the insert is fixed in front of the crystal sensor by a supporter, the supporter being coupled with the crystal sensor.