Controlling effusion cell of deposition system
View Patent ↗In a method of controlling an effusion cell in a deposition system, including a crucible, a guiding pathway and an injection nozzle, a guiding pathway and an injection nozzle are heated. The crucible is heated after heating the guiding pathway and the injection nozzle. In addition, in cooling the effusion cell including a crucible, a guiding pathway and an injection nozzle, the crucible is cooled. The guiding pathway and the injection nozzle are cooled after cooling the crucible. This method has an advantage of enhancing uniformity of the organic layer formed on the substrate by preventing the clogging of the injection nozzle by deposition material vaporized in the crucible or splashing.
1. A method of controlling an effusion cell including a crucible, a guiding pathway and an injection nozzle, the method comprising:
heating the guiding pathway and the injection nozzle; and
heating the crucible after heating the guiding pathway and the injection nozzle.
2. The method as claimed in claim 1 , wherein heating the crucible comprises heating by a first heating structure, and heating the guiding pathway and the injection nozzle comprises heating by a second heating structure.
3. The method as claimed in claim 1 , wherein heating the guiding pathway and the injection nozzle and heating the crucible after heating the guiding pathway and the injection nozzle further comprises:
heating the crucible using a temperature control method; and
heating the crucible using a deposition rate control method.
4. The method as claimed in claim 1 , further comprising arranging the effusion cell on a buffer area during heating the guiding pathway and the injection nozzle and heating the crucible after heating the guiding pathway and the injection nozzle.
5. A method of controlling an effusion cell including a crucible, a guiding pathway and an injection nozzle, the method comprising:
cooling the crucible; and
cooling the guiding pathway and the injection nozzle after cooling the crucible.
6. The method as claimed in claim 5 , wherein the deposition rate is monitored after cooling the crucible, and then the guiding pathway and the injection nozzle are cooled after cooling the crucible upon the monitored deposition rate being less than a predetermined value.
7. The method as claimed in claim 5 , further comprising arranging the effusion cell on a buffer area during cooling the crucible and cooling the guiding pathway and the injection nozzle after cooling the crucible.
8. A method of controlling an effusion cell including a crucible, a guiding pathway and an injection nozzle, the method comprising:
heating the guiding pathway and the injection nozzle;
heating the crucible;
performing a deposition;
cooling the crucible; and
cooling the guiding pathway and the injection nozzle.
9. The method as claimed in claim 8 , wherein heating the crucible further comprises:
heating the crucible using a temperature control method; and
heating the crucible using a deposition rate control method.
10. The method as claimed in claim 8 , wherein performing a deposition comprises:
determining whether a deposition rate is stable; and
performing deposition by shifting the effusion cell to a film forming area upon a determination that the deposition rate is stable.
11. The method as claimed in claim 10 , wherein determining that a deposition rate is stable comprises determining that the deposition rate is within a predetermined range.
12. The method as claimed in claim 10 , wherein determining that a deposition rate is stable comprises determining that the deposition rate is within a predetermined range during a predetermined period of time.
13. The method as claimed in claim 8 , wherein the deposition rate is monitored after cooling the crucible, and the guiding pathway and the injection nozzle are cooled upon the monitored deposition rate being less than a predetermined value.
14. The method as claimed in claim 8 , further comprising arranging the effusion cell on a buffer area during heating the guiding pathway and the injection nozzle, heating the crucible, cooling the crucible, and cooling the guiding pathway and the injection nozzle.
15. The method as claimed in claim 8 , wherein the crucible is heated by a first heating structure, and the guiding pathway and the injection nozzle is heated by a second heating structure.
16. A method of controlling an effusion cell, the method comprising:
heating the effusion cell using a temperature control method;
heating the effusion cell using a deposition rate control method after heating the effusion cell using a temperature control method; and
performing a deposition.
17. The method as claimed in claim 16 , wherein heating the effusion cell using a temperature control method comprises:
setting a first temperature as a target temperature and heating the effusion cell using a temperature control method; and
setting a second temperature as a target temperature and heating the effusion cell using a temperature control method.
18. The method as claimed in claim 17 , wherein the second temperature is higher than the first temperature.
19. The method as claimed in claim 16 , further comprising performing a deposition upon a determination that the deposition rate is stable.
20. The method as claimed in claim 19 , wherein the deposition rate is determined to be stable upon the deposition rate being within a predetermined range.
21. The method as claimed in claim 19 , wherein the deposition rate is determined to be stable upon the deposition rate being within a predetermined range during a predetermined period of time.
22. The method as claimed in claim 16 , further comprising arranging the effusion cell on a buffer area during heating the effusion cell using a temperature control method and heating the effusion cell using a deposition rate control method after heating the effusion cell using a temperature control method, and the effusion cell is shifted to a film forming area during performing a deposition.
23. The method as claimed in claim 16 , further comprising moving the effusion cell up and down during performing a deposition.