Substrate for liquid crystal display and liquid crystal display utilizing the same
View Patent ↗The generation of residues or flakes of a color filter is suppressed to eliminate conduction failures on an LCD substrate having a color filter on an array substrate. A passivation film formed between a pixel electrode formed in each of a plurality of pixel regions and a TFT for driving the pixel electrode has a multi-layer structure constituted by SiN layers and a SiO layers, and the SiO layer is located at the top of the film. A resin CF layer is formed on the passivation film having such a multi-layer structure. Since the resin CF layer is formed directly on the SiO layer, reduction of the adhesion of the same is suppressed. As a result, the color filter is unlikely to come off when the resin CF layer is formed, and residues of the color filter is unlikely to be generated when a contact hole is formed in the resin CF layer. This suppresses conduction failures and makes it possible to provide a reliable TFT substrate and LCD having high display characteristics.
1. A substrate for a liquid crystal display comprising:
a passivation film formed between a pixel electrode formed in each of a plurality of pixel regions and a switching element for driving the pixel electrode; and
a color filter layer formed on the passivation film;
wherein the passivation film has a multi-layer structure constituted by a silicon nitride layer and a silicon oxide layer or a silicon oxynitride layer and wherein the silicon oxide layer or the silicon oxynitride layer is formed in contact with the color filter layer.
2. A substrate for a liquid crystal display according to claim 1 , wherein the silicon oxide layer or the silicon oxynitride layer has a thickness of 3 nm or more and 20 nm or less.
3. A substrate for a liquid crystal display according to claim 1 , wherein the silicon nitride layer has a structure in which layers of two or more silicon nitrides having different compositions of silicon atoms and nitrogen atoms are stacked on one another.
4. A substrate for a liquid crystal display according to claim 1 , wherein the silicon nitride layer is formed such that a region of the layer has a higher density of silicon atoms, the closer the region to the silicon oxide layer or the silicon oxynitride layer in contact with the color filter layer or such that a region of the layer has a higher density of hydrogen atoms bonded with silicon atoms, the closer the region to the silicon oxide layer or the silicon oxynitride layer in contact with the color filter.
5. A liquid crystal display comprising:
a base substrate having a passivation film formed between a pixel electrode formed in each of a plurality of pixel regions and a switching element for driving the pixel electrode and a color filter layer formed on the passivation film;
an opposite substrate provided opposite to the base substrate for a liquid crystal display; and
a liquid crystal layer sandwiched between the base substrate and the opposite substrate;
wherein the passivation film of the base substrate has a multi-layer structure constituted by a silicon nitride layer and a silicon oxide layer or a silicon oxynitride layer and wherein the silicon oxide layer or the silicon oxynitride layer is formed in contact with the color filter layer.