System and method of planar positioning
A system and method of controlling the relationship between two surfaces (such as a primary surface and a reference surface) and correcting any deviation from the desired or ideal relationship generally employ a plurality of actuators and flexural assemblies. The actuators may be driven in unison to translate the primary surface in one-dimension; the actuators may also be driven independently, accommodating fine adjustment in pitch, roll, or both, of the primary surface. Flexural assemblies may be implemented to minimize lateral cross-coupling between the linear actuators.
1 - 17 . (canceled)
18 . A method of controlling the relationship between surfaces in a probe card analysis system; said method comprising:
defining a reference surface a primary surface
coupling said reference surface to a primary surface by a plurality of actuators; and,
controlling the relationship between said primary surface and said reference surface; wherein controlling comprises driving selected ones of said plurality of actuators, and receiving feedback from at least three of said plurality of actuators.
19 . The method of claim 18 wherein said driving includes driving each of said plurality of actuators in unison to obtain linear motion.
20 . The method of claim 18 wherein said driving includes driving at least one of said plurality of actuators independently to control pitch and roll.
21 . A system comprising:
a platform having a primary surface attached thereto;
a frame, and
a plurality of actuators attaching said platform to said frame, said plurality of actuators operable to provide feedback from at least three of said plurality of actuators.
22 . A metrology system comprising:
a metrology frame having one or more vertically-aligned structural members;
a plurality of linear actuators attached to said vertically-aligned structural members; and
a platform supporting a primary surface and coupled to each of said plurality of linear actuators; wherein
said plurality of linear actuators is operative to stabilize the primary surface relative to a reference surface.
23 . The metrology system of claim 22 and further comprising a respective flexural assembly attached to each of said plurality of linear actuators and coupling a respective linear actuator to said platform.
24 . The metrology system of claim 23 wherein each respective flexural assembly is operative to minimize lateral cross-coupling between said plurality of linear actuators.