Use of doped silicon dioxide in the fabrication of solar cells
View Patent ↗In one embodiment, a method of forming doped regions in a substrate of a back side contact solar cell includes the steps of depositing a first doped oxide layer on a back side of a substrate, depositing a first undoped oxide layer over the first doped oxide layer, diffusing a first dopant from the first doped oxide layer into the substrate to form a first doped region in the substrate, and diffusing a second dopant into the substrate by way of a front side of the substrate, wherein the diffusion of the first dopant and the second dopant into the substrate are performed in-situ. The method may further include the steps of patterning the first doped and undoped oxide layers to expose portions of the back side of the substrate and depositing a second doped and undoped oxide layers on the back side of the substrate.
1. A method of fabricating a back side contact solar cell, the method comprising:
forming a first layer of material over a back side of a substrate;
forming a second layer of material over the first layer of material, the second layer of material serving as a diffusion barrier;
diffusing a first dopant from the first layer of material to form a first doped region of a solar cell;
diffusing a second dopant into the substrate by way of a front side of the substrate; and
wherein the diffusion of the first dopant and the second dopant are performed in-situ.
2. The method of claim 1 further comprising:
prior to diffusing the first dopant from the first layer of material:
patterning the first layer of material and the second layer of material;
forming a third layer of material on the back side of the substrate;
forming a fourth layer of material over the third layer of material, the fourth layer of material serving as a barrier layer; and
diffusing a third dopant from the third layer of material to form a second doped region of the solar cell, wherein the third dopant is diffused in-situ with the first dopant.
3. The method of claim 2 wherein the third layer of material comprises phosphorus-doped silicon dioxide.
4. The method of claim 1 wherein the first layer of material comprises boron-doped silicon dioxide.
5. The method of claim 1 further comprising:
forming a printed mask over the first layer of material and the second layer of material.
6. The method of claim 5 wherein the mask is formed by screen printing.
7. The method of claim 2 wherein the first dopant comprises a P-type dopant, the second dopant comprises an N-type dopant, and the third dopant comprises an N-type dopant.
8. A method of fabricating a solar cell, the method comprising:
providing a substrate having a front side and a back side, the front side of the substrate being configured to receive solar radiation for a solar cell;
forming a first doped layer over the back side of the substrate;
diffusing a first dopant from the first doped layer to form a first doped region of the solar cell; and
diffusing a second dopant from the front side of the substrate in-situ with the diffusion of the first dopant from the first doped layer.
9. The method of claim 8 further comprising:
forming a second doped layer over the back side of the substrate; and
diffusing a third dopant from the second doped layer to form a second doped region of the solar cell, the diffusion of the third dopant from the second doped layer being performed in-situ with the diffusion of the first dopant from the first doped layer.
10. The method of claim 8 further comprising:
forming a first undoped layer over the first doped layer to minimize diffusion of the third dopant from the second doped layer into the first doped layer.
11. The method of claim 10 further comprising:
forming a second undoped layer over the second doped layer to minimize diffusion of the third dopant from the second doped layer into a processing environment where the substrate is heated.
12. The method of claim 8 wherein the first dopant from the first doped layer comprises a P-type dopant and the second dopant diffused from the front side of the substrate comprises an N-type dopant.