Laser apparatus and manufacturing method of thin film transistor using the same

1. A laser apparatus comprising:

a laser generating unit; and

an intensity pattern regulating unit including a pair of blocking parts and a pair of semi-through parts,

wherein the pair of semi-through parts are placed between the pair of blocking parts and reduce an intensity of an incident laser beam passing through the pair of semi-through parts,

wherein a metal plate is provided in each blocking part, and a base substrate and a coating layer formed on the base substrate are provided in each semi-through part.

2. The laser apparatus of claim 1 , wherein each semi-through part is extended from each blocking part.

3. The laser apparatus of claim 1 , wherein the intensity of the laser beam becomes weaker through a portion of a semi-through part that is closer to a blocking part.

4. The laser apparatus of claim 3 , wherein the intensity of the laser beam reduces stepwise in the semi-through part.

5. The laser apparatus of claim 1 , wherein the pair of blocking parts are disposed parallel with each other.

6. The laser apparatus of claim 1 , wherein the coating layer comprises at least one of Cr, MgF 2 , Al 2 O 3 , SiO 2 , CaF 2 , AlF 3 , or MoSi.

7. The laser apparatus of claim 1 , wherein the coating layer comprises a slit.

8. The laser apparatus of claim 1 , wherein the incident laser beam passing through the intensity pattern regulating unit comprises a strip shape, and the intensity of the incident laser beam is abruptly reduced at its opposite ends.

9. The laser apparatus of claim 1 , further comprising a projection lens adjusting a focus of the incident laser beam generated from the laser generating unit, wherein the intensity pattern regulating unit is placed behind the projection lens.

10. A laser apparatus comprising:

a laser generating unit; and

an intensity pattern regulating unit comprising a pair of blocking parts, a through part placed between the pair of blocking parts and a semi-through part disposed between each blocking part and the through part,

wherein:

an intensity of a laser beam passing through the through part maintained,

an intensity of a laser beam passing through the semi-through part is reduced, and

a metal plate is provided in each blocking part, and a base substrate and a coating layer formed on the base substrate are provided in each semi-through part.

11. The laser apparatus of claim 10 , wherein the through part comprises a strip shape.