Method for producing a semiconductor component with a plastic housing and carrier plate for performing the method
View Patent ↗A process for producing a semiconductor component having a plastic housing in which at least one semiconductor chip is arranged includes providing a semiconductor wafer having semiconductor chips which are arranged in rows and columns and have active top surfaces and back surfaces, the active top surfaces being provided with contact surfaces. The semiconductor wafer are divided into individual semiconductor chips, which are mounted on a carrier plate that has a thermosensitive adhesive on its top surface, such that the active top surfaces of the individual semiconductor chips are placed onto the top surface of the carrier plate. A common carrier is produced from a plastic embedding compound on the carrier plate, with the semiconductor chips being embedded in the plastic embedding compound. The carrier plate is removed by heating the thermosensitive adhesive to a predetermined, defined temperature at which the thermosensitive adhesive loses its adhesive action.
1. A method for producing a semiconductor component including a plastic housing in which at least one semiconductor chip is arranged, the method comprising:
providing a semiconductor wafer having semiconductor chips that are arranged in rows and columns and include active top surfaces and back surfaces, the active top surfaces being provided with contact surfaces;
dividing the semiconductor wafer into individual semiconductor chips;
providing a carrier plate having a thermosensitive adhesive on its top surface;
mounting the individual semiconductor chips on the carrier plate, the active surfaces of the individual semiconductor chips being placed onto the top surface of the carrier plate;
producing a common carrier comprising a plastic embedding compound on the carrier plate, with the semiconductor chips being embedded in the plastic embedding compound; and
removing the carrier plate by heating the thermosensitive adhesive to a predetermined, defined temperature at which the thermosensitive adhesive loses its adhesive action.
2. The method of claim 1 , wherein the semiconductor chips are incorporated into the plastic embedding compound such that the back surfaces of the individual semiconductor chips are completely covered with the plastic embedding compound.
3. The method of claim 1 , further comprising:
producing rewiring lines on the top surface of the common carrier;
forming outer contact surfaces;
applying solder balls or solder bumps to the outer contact surfaces; and
dividing the common carrier into individual semiconductor components.
4. The method of claim 1 , wherein the carrier plate ( 8 ) is laminated on its top surface ( 9 ) to an adhesive film ( 12 ), which is provided with a thermosensitive adhesive ( 10 ) on its side facing away from the carrier plate and is provided with a permanent adhesive on its side facing the carrier plate.
5. The method of claim 1 , wherein the carrier plate is laminated on its top surface to an adhesive film, which is provided with a permanent adhesive on its side facing away from the carrier plate and is provided with a thermosensitive adhesive on its side which faces the carrier plate.
6. The method of claim 1 , wherein the carrier plate ( 8 ) is directly provided with a thermosensitive adhesive ( 10 ) on its top surface ( 9 ).
7. The method of claim 1 , wherein a metallic carrier plate is provided.
8. The method of claim 1 , wherein a ceramic carrier plate is provided.
9. The method of claim 1 , wherein a carrier plate made from glass or silicon is provided.