Micro-miniature implantable coated device
An implantable micro-miniature device is disclosed. The device comprises a thin hermetic insulating coating and at least one thin polymer or metal secondary coating over the hermetic insulating layer in order to protect the insulating layer from the erosive action of body fluids or the like. In one embodiment the insulating layer is ion beam assisted deposited (IBAD) alumina and the secondary coating is a parylene polymer. The device may be a small electronic device such as a silicon integrated circuit chip. The thickness of the insulating layer may be ten microns or less and the thickness of the secondary layer may be between about 0.1 and about 15 microns.
1. A micro-miniature implantable device comprising:
a device for use within a living organism,
a contact pad on said device connected to a conductor;
a biocompatible inorganic hermetic insulating conformal coating deposited directly on said device for use within a living organism and defining an opening over said contact pad, wherein the biocompatible inorganic hermetic insulating conformal coating surrounds the device for use within a living organism, and
a biocompatible protective polymer conformal layer directly overlying said biocompatible inorganic hermetic insulating conformal coating and defining an opening over said contact pad;
wherein the conductor extends through the inorganic hermetic insulated coating and the biocompatible protective polymer conformal layer.
2. The micro-miniature implantable device of claim 1 , wherein said device for use within a living organism comprises an active electronic circuit.
3. The micro-miniature implantable device of claim 2 , wherein said device for use within a living organism comprises an integrated circuit chip, and said biocompatible inorganic hermetic insulating conformal coating covers at least a portion of said integrated circuit chip.
4. The micro-miniature implantable device of claim 1 wherein said device for use within a living organism comprises a passive component.
5. The micro-miniature implantable device of claim 4 wherein said passive component is a resistor, inductor, capacitor, or magnet.
6. The micro-miniature implantable device of claim 1 , wherein said biocompatible inorganic hermetic insulating conformal coating is a biocompatible ceramic coating.
7. The micro-miniature implantable device of claim 1 , wherein said biocompatible inorganic hermetic insulating conformal coating comprises a biocompatible metal oxide coating.
8. The micro-miniature implantable device of claim 7 , wherein said biocompatible metal oxide coating comprises aluminum oxide, zirconium oxide, titanium dioxide, vanadium oxide, or mixtures thereof.
9. The micro-miniature implantable device of claim 1 , wherein said biocompatible inorganic hermetic insulating conformal coating comprises silicon carbide, titanium nitride, aluminum nitride, silicon nitride, silicon dioxide, ultra-nano crystalline diamond, or mixtures thereof.
10. The micro-miniature implantable device of claim 1 , wherein said biocompatible protective polymer conformal layer comprises parylene.
11. The micro-miniature implantable device of claim 1 , wherein said biocompatible protective polymer conformal layer comprises a polyimide, a silicone, an epoxy, a liquid crystal polymer, a polyethylene glycol, a polyethylene terephthalate, a tetrafluoroethylene, or mixtures, copolymers, or block polymers thereof.
12. The micro-miniature implantable device of claim 1 wherein said biocompatible inorganic hermetic insulating conformal coating has a thickness less than about 10 micrometers.
13. The micro-miniature implantable device of claim 1 wherein said biocompatible protective polymer conformal layer has a thickness less than about 15 micrometers.
14. The micro-miniature implantable device of claim 13 wherein said biocompatible protective polymer conformal layer has a thickness between about 3 and about 15 micrometers.
15. The micro-miniature implantable device of claim 13 wherein said biocompatible protective polymer conformal layer has a thickness between about 4and about 10 micrometers.
16. The micro-miniature implantable device of claim 1 further comprising at least one biocompatible protective layer overlying said biocompatible protective polymer conformal layer.
17. A micro-miniature implantable device, comprising:
a device for use within a living organism, said device for use within a living organism comprising an active electronic circuit;
a contact pad on said device connected to a conductor;
a biocompatible inorganic hermetic insulating conformal coating deposited directly on and surrounding said device for use within a living organism and defining an opening over said contact pad, wherein the biocompatible inorganic hermetic insulating conformal coating form a compete hermetic encasement of the device for use within a living organism; and
a biocompatible protective metal conformal layer directly overlying and substantially covering said biocompatible inorganic hermetic insulating conformal coating and defining an opening over said contact pad;
wherein the conductor extends through the inorganic hermetic insulated conformal coating and the biocompatible protective metal conformal layer.
18. The micro-miniature implantable device of claim 17 , wherein said biocompatible protective metal conformal layer comprises titanium, platinum, iridium, or mixtures thereof.
19. The micro-miniature implantable device of claim 17 , wherein said biocompatible protective metal conformal layer comprises titanium.
20. The micro-miniature implantable device of claim 17 , wherein said biocompatible protective metal conformal layer is between about 0.01 and about 10 micrometers thick.
21. The micro-miniature device of claim 17 , wherein said biocompatible protective metal conformal layer is between about 0.02 and about 8 micrometers thick.
22. The micro-miniature implantable device of claim 17 , wherein said biocompatible protective metal conformal layer is between about 0.03 and about 6 micrometers thick.
23. The micro-miniature implantable device of claim 17 further comprising at least one biocompatible protective layer overlying said biocompatible protective metal conformal layer.