Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, frequency stabilization method, and method of manufacturing the piezoelectric vibrator
View Patent ↗A piezoelectric vibration element is provided which includes a piezoelectric substrate formed of a thickness slip based piezoelectric material and a metal layer formed on a surface of the piezoelectric substrate. In the piezoelectric vibration element, a surface of the metal layer is covered by a layer formed by chemical absorption with a material having a nonbonding electron pair.
1. A piezoelectric vibration element, comprising:
a piezoelectric substrate formed of a thickness slip based piezoelectric material; and
a metal layer formed on a surface of the piezoelectric substrate,
wherein a surface of the metal layer is covered by a layer formed by chemical absorption with a material having a nonbonding electron pair.
2. A piezoelectric vibration element, comprising:
a piezoelectric substrate; and
a piezoelectric vibration element having a metal layer formed on a surface of the piezoelectric substrate,
wherein a surface of the metal layer is covered by a layer formed by chemical absorption with a material having a nonbonding electron pair, and an almost entire surface of the metal layer is covered by the layer so that a reduced amount of a resonant frequency is less than 1 ppm even when a layer is further formed on the surface of the metal layer that is not covered by the layer.
3. A piezoelectric vibrator, comprising:
the piezoelectric vibration element according to claim 1 ; and
a case in which the piezoelectric vibration element is hermetically encapsulated.
4. A piezoelectric vibrator, comprising:
the piezoelectric vibration element according to claim 1 ; and
a case receiving and hermetically encapsulating the piezoelectric vibration element in an inert gas while supporting the piezoelectric vibration element by means of a silicon based conductive adhesive.
5. A piezoelectric oscillator, comprising:
an oscillation circuit component disposed inside or outside the case according to claim 3 .
6. A piezoelectric vibrator, comprising:
a piezoelectric vibration element having a piezoelectric substrate formed of a thickness slip based piezoelectric material and a metal layer on a surface of the piezoelectric substrate; and
a case in which the piezoelectric vibration element is held by a conductive bonding member,
wherein a surface of the metal layer exposed in an atmosphere is covered by a layer formed by chemical absorption with a material having a nonbonding electron pair.
7. A piezoelectric vibrator, comprising:
a piezoelectric vibration element having a piezoelectric substrate and a metal layer on a surface of the piezoelectric substrate; and
a case in which the piezoelectric vibration element is held by a conductive bonding member,
wherein a surface of the metal layer exposed in an atmosphere is covered by a monomolecular layer formed by chemical absorption with a material having a nonbonding electron pair, and an almost entire surface of the metal layer is covered by the monomolecular layer so that a reduced amount of a resonant frequency is less than 1 ppm even when a monomolecular layer is further formed on the surface of the metal layer that is not covered by the monomolecular layer.
8. The piezoelectric vibrator according to claim 7 ,
wherein the resonant frequency meets a target frequency in the air when an area of the entire surface of the metal layer occupied by the monomolecular layer corresponds to 100% of the entire surface of the metal layer.
9. A piezoelectric vibrator, comprising:
the piezoelectric vibration element according to claim 1 hermetically encapsulated in a case.
10. A piezoelectric vibrator, comprising:
the piezoelectric vibration element according to claim 1 , the piezoelectric vibration element being held by means of a silicon based conductive adhesive and hermetically encapsulated in an inert gas atmosphere.
11. A piezoelectric oscillator, comprising:
an oscillation circuit component disposed inside or outside the case according to claim 6 .