IP Library › Granted Patent US 7,442,933
Granted Patent B2
US 7,442,933 · App. 11/345,968 · Granted Oct 28, 2008

Bolometer having an amorphous titanium oxide layer with high resistance stability

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Quick Facts
Patent No.
US 7,442,933
App. No.
11/345,968
Granted
Oct 28, 2008
Kind
B2
Abstract

A bolometer is provided for use in an infrared imager. The bolometer comprises a substrate and a TiOx layer formed over the substrate. The TiOx layer has a resistance responsive to temperature. The x value of the TiOx layer is in the range of 1.68 to 1.95.

Claims (4)

1. A bolometer for use in an infrared imager, comprising:

a substrate; and

a TiOx layer formed over the substrate, the TiOx layer having a resistance responsive to temperature, where x is in the range of 1.68 to 1.95,

wherein the TiOx layer is heated at a predetermined temperature in a range of 300° C. to 420° C. for a predetermined period in a range of 5 to 20 minutes such that the TiOx layer has a substantially constant resistance stability.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded Apr 9, 2018
From: WELLS FARGO BANK, NATIONAL ASSOCIATION SUCCESSOR BY MERGER TO WACHOVIA BANK, NATIONAL ASSOCIATION
To: DRS SENSORS & TARGETING SYSTEMS, INC.
Reel/Frame 045877/0857 →
CHANGE OF NAME Recorded Mar 31, 2015
From: DRS RSTA, INC.
To: DRS NETWORK & IMAGING SYSTEMS, LLC
Reel/Frame 035349/0060 →
CHANGE OF NAME Recorded Feb 8, 2010
From: DRS SENSORS & TARGETING SYSTEMS, INC.
To: DRS RSTA, INC.
Reel/Frame 023905/0520 →