Method of patterning conductive polymer layer, organic light emitting device, and method of manufacturing the organic light emitting device
View Patent ↗A method of patterning a conductive polymer, an organic light emitting device (OLED) manufactured using the method of patterning a conductive polymer, and a method of manufacturing the OLED are provided. The method of patterning a conductive polymer includes forming a conductive polymer layer on a substrate, aligning a shadow mask above the conductive polymer layer, and forming a conductive polymer pattern area and an insulating area in the conductive polymer layer by radiating charged particle beams through the shadow mask.
1. A method of patterning a conductive polymer, comprising:
forming a conductive polymer layer on a substrate;
aligning a shadow mask above the conductive polymer layer; and
forming a conductive polymer pattern area and an insulating area in the conductive polymer layer by radiating charged particle beams through the shadow mask.
2. The method of claim 1 , wherein the conductive polymer layer is formed of a conjugated polymer.
3. The method of claim 1 , wherein the insulating area is formed on a portion of the conductive polymer layer onto which the charged particle beams are radiated.
4. The method of claim 1 , wherein the charged particle beams are one of electrons and ions.
5. The method of claim 4 , wherein the ions are ions of a material selected from the group consisting of H, Li, Na, K, Rb, Fr, F, Cl, Br, I, At, Ne, Kr, Xe, Rn, He, Ar, N, O, and Cs.
6. A patterned conductive polymer formed by using the method of claim 1 .
7. An organic light emitting device comprising a hole injection layer, a hole transport layer, and a light emitting layer, wherein at least one of the hole injection layer, the hole transport layer, and the light emitting layer is formed of the patterned conductive polymer of claim 6 .
8. A method of patterning a conductive polymer, the method comprising:
forming a conductive polymer layer on a substrate;
aligning a mask having a patterned hole above the conductive polymer layer; and
radiating charged particle beams through the patterned hole of the mask to form a patterned conductive polymer.
9. The method of claim 8 , wherein the conductive polymer layer is formed of a conjugated polymer.
10. The method of claim 8 , wherein a radiated area of the conductive polymer layer forms an insulating polymer layer.
11. The method of claim 8 , wherein the charged particle beams are one of electrons and ions.
12. The method of claim 11 , wherein the ions are ions of a material selected from the group consisting of H, Li, Na, K, Rb, Fr, F, Cl, Br, I, At, Ne, Kr, Xe, Rn, He, Ar, N, O, and Cs.
13. The method of claim 8 , wherein the mask is a shadow mask.
14. The method of claim 8 , wherein the mask comprises a plurality of shadow masks.
15. The method of claim 14 , wherein the plurality of shadow masks have stepwise potential.
16. A method of manufacturing an organic light emitting device, the method comprising:
forming an anode on a substrate;
forming a conductive polymer layer on the anode;
aligning a shadow mask above the conductive polymer layer;
forming a conductive polymer pattern area and an insulating area in the conductive polymer layer by radiating charged particle beams through the shadow mask;
forming a light emitting layer on the conductive polymer pattern layer and the insulating area; and
forming a cathode on the light emitting layer.
17. The method of claim 16 , wherein the conductive polymer layer is formed of a conjugated polymer.
18. The method of claim 16 , wherein the insulating area is formed on a portion of the conductive polymer layer onto which the charged particle beams are radiated.
19. The method of claim 16 , wherein the particles are one of electrons and ions.
20. The method of claim 19 , wherein the ions are ions of a material selected from the group consisting of H, Li, Na, K, Rb, Fr, F, Cl, Br, I, At, Ne, Kr, Xe, Rn, He, Ar, N, O, and Cs.