Semiconductor device, electrode member and electrode member fabrication method
View Patent ↗A semiconductor device that improves the heat cycle resistance and power cycle resistance of a power module. An electrode member in which copper posts are formed in a plurality of perforations cut in a support made of a ceramic material is soldered onto a side of an IGBT where an emitter electrode is formed. By soldering the copper posts onto the electrode, heat generated in the IGBT is transferred to the electrode member and is radiated. In addition, even if a material of which the IGBT is made and copper differ in thermal expansivity, stress on a soldered interface is reduced and distortion is reduced. This suppresses the appearance of a crack. As a result, the heat cycle resistance and power cycle resistance of a power module can be improved.
1. A semiconductor device having a semiconductor element with an electrode on a surface, the device comprising an electrode member including:
an insulating ceramic member with a plurality of perforations that pierce through principal planes of the insulating ceramic member; and
a plurality of individual copper or aluminum posts that are embedded in the plurality of perforations, respectively, and are supported by the insulating ceramic member, each of the plurality of copper or aluminum posts being electrically and thermally connected to the electrode by a solder layer at an interface between the electrode and the copper or aluminum posts,
wherein one end of each of the plurality of copper or aluminum posts is level with one principal plane of the insulating ceramic member and another end of each of the plurality of copper or aluminum posts is level with another principal plane of the insulating ceramic member.
2. The semiconductor device according to claim 1 , wherein a conductor layer is formed on a principal plane of the electrode member joined to the electrode.
3. The semiconductor device according to claim 1 , wherein in the electrode member, end portions of the metal posts protrude from at least one principal plane of the insulating support.
4. The semiconductor device according to claim 3 , wherein a cooling medium can be passed between the metal posts which protrude from the insulating support and the surface where the metal posts are joined to the electrode.
5. The semiconductor device according to claim 1 , wherein:
the semiconductor element is an insulated gate bipolar transistor; and
the electrode is at least one of an emitter electrode and a collector electrode of the insulated gate bipolar transistor.
6. The semiconductor device according to claim 1 , wherein:
the semiconductor element is a diode; and
the electrode is at least one of an anode electrode and a cathode electrode of the diode.
7. The semiconductor device according to claim 1 , wherein a radius of each of the plurality of copper or aluminum posts is larger than a distance between adjacent metal posts.
8. The semiconductor device according to claim 1 , wherein the plurality of individual copper or aluminum posts are separated from each other by the insulating ceramic member.
9. An electrode member electrically and thermally connected to an electrode of a semiconductor device by a solder layer at an interface between the electrode and the electrode member, the member comprising:
an insulating ceramic member with a plurality of perforations that pierce through principal planes of the insulating ceramic member; and
a plurality of individual copper or aluminum posts embedded in the plurality of perforations, respectively, and supported by the insulating ceramic member,
wherein one end of each of the plurality of copper or aluminum posts is level with one principal plane of the insulating ceramic member and another end of each of the plurality of copper or aluminum posts is level with another principal plane of the insulating ceramic member.
10. The electrode member according to claim 9 , wherein:
at least one end of each of the metal posts is on a principal plane of the insulating support; and
a conductor layer is formed on the principal plane.
11. The electrode member according to claim 9 , wherein end portions of the metal posts protrude from at least one principal plane of the insulating support.
12. The electrode member according to claim 9 , wherein:
diameters of metal posts located in the center of the insulating support are larger than diameters of metal posts located in edge portions of the insulating support; and
density of the metal posts located in the edge portions of the insulating support is higher than density of the metal posts located in the center of the insulating support.
13. The electrode member according to claim 9 , wherein the metal posts are formed by using copper or aluminum.
14. The electrode member according to claim 9 , wherein the plurality of individual copper or aluminum posts are separated from each other by the insulating ceramic member.
15. A semiconductor device having a semiconductor element with an electrode on a surface, an electrode member being electrically and thermally connected to the electrode by a solder layer at an interface between the electrode and the electrode member, the electrode member including:
an insulating ceramic member with a plurality of perforations that pierce through principal planes of the insulating ceramic member; and
a plurality of individual copper or aluminum posts embedded in the plurality of perforations, respectively, and supported by the insulating ceramic member,
wherein one end of each of the plurality of copper or aluminum posts is level with one principal plane of the insulating ceramic member and another end of each of the plurality of copper or aluminum posts is level with another principal plane of the insulating ceramic member.
16. The semiconductor device according to claim 15 , wherein a radius of each of the plurality of copper or aluminum posts is larger than a distance between adjacent metal posts.
17. The semiconductor device according to claim 15 , wherein the plurality of individual copper or aluminum posts are separated from each other by the insulating ceramic member.