Pressure detecting apparatus
View Patent ↗A pressure detecting apparatus has a pressure detecting device that converts a strain caused by a stress exerted thereto to an electrical signal, and outputs the converted electrical signal. The apparatus has a housing base including a housing recess that houses the pressure detecting device therein, and a connecting material interposed between the pressure detecting device and the housing recess. The connecting material connects the pressure detecting device and the housing recess with a tensile elongation percentage of about 400% or higher. The pressure detecting apparatus facilitates preventing thermal stress from adversely affecting the detection performance thereof, and produces excellent thermal response.
1. A pressure detecting apparatus comprising:
a pressure detector for converting a strain induced by a stress exerted thereto to an electrical signal, and for outputting the electrical signal;
a base comprising a housing for accommodating the pressure detector therein; and
a connector, interposed between the pressure detector and the housing, for connecting the pressure detector and the housing, said connector having a tensile elongation percentage of 400% or higher.
2. The pressure detecting apparatus according to claim 1 , wherein the pressure detector comprises a semiconductor.
3. The pressure detecting apparatus according to claim 1 , wherein the base comprises a resin molding.
4. The pressure detecting apparatus according to claim 1 , wherein the connector comprises a silicone resin adhesive.
5. The pressure detecting apparatus according to claim 1 , wherein the connector is provided such that a distance between a bonding plane of the pressure detector and a bonding plane of the housing is from 30μm to 100μm.
6. The pressure detecting apparatus according to claim 1 , wherein said pressure detector comprises a pedestal, a semiconductor substrate disposed on the pedestal, and a diaphragm attached to the semiconductor substrate, said connector being arranged between bottoms of the pedestal and housing of the base.
7. The pressure detecting apparatus according to claim 6 , wherein said base further includes a plurality of protrusions projecting upwardly from the bottom of the housing to receive the pedestal thereon.
8. The pressure detecting apparatus according to claim 7 , further comprising a protecting material for covering on and around the pressure detector.