IP Library Granted Patent US 7,360,851
Granted Patent B1
US 7,360,851 · App. 11/355,699 · Granted Apr 22, 2008

Automated pattern recognition of imprint technology

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Quick Facts
Patent No.
US 7,360,851
App. No.
11/355,699
Granted
Apr 22, 2008
Kind
B1
Abstract

An apparatus and method for control of spreading of liquid drops are disclosed. An initial pattern of drops of liquid is deposited on a first surface. A second surface is brought into sufficient contact with the initial pattern of the drops that the liquid starts to spread. Two or more digital images of the liquid are captured after it begins to spread. A digital analysis is performed on these images to determine whether one or more portions of the initial pattern of drops require more or less liquid. A subsequent pattern of liquid droplets is adjusted based on the digital analysis.

Claims (33)

1. A method for control of spreading of liquid droplets, comprising:

depositing an initial pattern of drops of a liquid on a first surface;

bringing a second surface into sufficient contact with at least a portion of the initial pattern of drops on the first surface that the liquid begins to spread;

capturing one or more digital images of the liquid after it begins to spread;

performing a digital analysis of the one or more images to determine whether one or more portions of the initial pattern of drops require more liquid; and

adjusting a subsequent pattern of drops of liquid based on the digital analysis of the two or more images.

2. The method of claim 1 , further comprising bringing the second surface into contact with the subsequent pattern.

3. The method of claim 1 wherein the second surface is a patterned surface of a nano-imprint lithography template.

4. The method of claim 1 , wherein the one or more images include two or more digital images captured at an interval of greater than about 1 second between subsequent images.

5. The method of claim 1 , further comprising the step of capturing one or more initial digital images of the initial pattern of drops of the liquid before bringing the second surface into sufficient contact with at least a portion of the pattern of drops, wherein performing a digital analysis of the one or more images includes performing a digital analysis of the one or more initial digital images.

6. The method of claim 1 , wherein adjusting the subsequent pattern of drops includes increasing a rate of flow and/or a number of droplets for one or more portions of the subsequent pattern that correspond to one or more locations on the first or second surface where the liquid did not spread after bringing the second surface into sufficient contact with at least a portion of the initial pattern of drops.

7. The method of claim 1 , wherein adjusting the subsequent pattern of drops includes increasing a rate of flow for a drop located at a position corresponding to a location of a particle on the second surface, bringing the second surface into contact with the subsequent pattern, and separating the second surface from contact with the subsequent pattern, wherein the increased flow is sufficient such that the particle holds to the liquid when the second surface separates from contact with the subsequent pattern.

8. The method of claim 1 wherein the subsequent pattern of drops is formed on the first surface at a different location than a location of the initial pattern.

9. The method of claim 1 wherein capturing the two or more digital images includes capturing three or more digital images over a period of about ten seconds after bringing the second surface into sufficient contact with at least a portion of the initial pattern of drops.

10. The method of claim 1 wherein adjusting the subsequent pattern includes adjusting a flow for droplets forming the drops within a portion of the subsequent pattern according to a predicate.

11. The method of claim 1 wherein the second surface is a patterned surface of a nano-imprint lithography template, the method further comprising bringing the patterned surface into sufficient contact with the subsequent pattern of droplets of the liquid to spread the drops into a liquid film.

12. The method of claim 11 , further comprising the step of hardening the liquid film to form a hardened film.

13. The method of claim 12 , further comprising the step of separating the patterned surface from the hardened film.

14. The method of claim 1 wherein performing a digital analysis of the two or more images includes identifying one or more locations in one or more of the two or more images where the liquid did not spread.

15. The method of claim 1 wherein the first or second surface is a surface of a transparent material, wherein capturing one or more digital images of the liquid includes viewing the liquid through the transparent material.

16. An apparatus for control of spreading of liquid droplets, comprising:

a droplet dispenser configured to form an initial pattern of drops of liquid on a first surface;

means for brining a second surface into sufficient contact with at least a portion of the initial pattern of drops on the first surface that the liquid begins to spread;

a camera configured to capture one or more digital images of the liquid after it begins to spread; and

a controller coupled to the droplet dispenser and the camera, the controller having a processor and a processor readable medium having embodied therein processor executable instructions, including

an instruction for performing a digital analysis of the two or more digital images to determine whether one or more portions of the initial pattern of liquid drops require more liquid; and

an instruction for adjusting a subsequent pattern of drops based on the digital analysis of the two or more images.

17. The apparatus of claim 16 , wherein the second surface is a patterned surface of a nano-imprint lithography template.

18. The apparatus of claim 16 wherein the camera is a digital camera.

19. The apparatus of claim 18 wherein the digital camera has a resolution of greater than or equal to about 1.3 megapixels.

20. The apparatus of claim 18 wherein the digital has a resolution of greater than or equal to about 6.6 megapixels.

21. The apparatus of claim 16 wherein the first or second surface is a surface of a transparent material.

22. The apparatus of claim 21 wherein the camera is positioned to view the liquid through the transparent material.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 4, 2012
From: BABAYI, ROBERT; ROBERTS, MARK
To: GEOFENCE DATA ACCESS CONTROLS LLC
Reel/Frame 027480/0266 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 10, 2009
From: PERDIEM LLC; DIEM, DARRELL, MR.
To: BABAYI, ROBERT; ROBERTS, MARK
Reel/Frame 022374/0201 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 15, 2006
From: SNYDER, BRYAN L.
To: KLA-TENCOR TECHNOLOGIES CORPORATION
Reel/Frame 017597/0933 →