Positive resist composition and pattern forming method using the same
View Patent ↗The invention provides a positive resist composition suitably usable at the time of using an ArF excimer laser light as the exposure light source, assured of excellent performance in view of resist profile, sensitivity, resolution and line edge roughness, and free from occurrence of pattern falling and development defect, and a pattern forming method using the composition, which are a positive resist composition comprising (A) a compound capable of generating an acid upon irradiation with actinic rays or radiation, (B) a resin having an alicyclic hydrocarbon structure, which decomposes under the action of an acid to increase the solubility in an alkali, and (C) a chain compound having one or two group(s) selected from a hydroxyl group and a group where the hydrogen atom of a hydroxyl group is substituted with an organic group, in which the chain compound is a solid at ordinary temperature under atmospheric pressure, and a pattern forming method using the composition.
1. A positive resist composition comprising:
(A) a compound capable of generating an acid upon irradiation with actinic rays or radiation;
(B) a resin having an alicyclic hydrocarbon structure, which decomposes under the action of an acid to increase the solubility in an alkali; and
(C) a chain compound having one or two group(s) selected from a hydroxyl group and a group where the hydrogen atom of a hydroxyl group is substituted with a linear alkoxy group having a carbon number of 1 to 3, the chain compound being a solid at ordinary temperature under atmospheric pressure, and the chain compound having a carbon number of 9 to 24.
2. The positive resist composition as claimed in claim 1 , wherein the compound (C) is represented by the following fonnula (I):
wherein
R 1 and R 2 each independently represents a methyl group, a hydroxyl group, or a group where the hydrogen atom of a hydroxyl group is substituted with an organic group,
R 3 to R 6 each independently represents a hydrogen atom, a methyl group, a hydroxyl group, or a group where the hydrogen atom of a hydroxyl group is substituted with an organic group,
provided that the total of the number of hydroxyl group and the number of the group where the hydrogen atom of a hydroxyl group is substituted with an organic group in R 1 to R 6 is 1 or 2,
X represents a single bond,
R 7 represents a hydrogen atom, and
n is an integer of 2 to 10.
3. The positive resist composition as claimed in claim 1 , wherein the compound (C) has a melting point of 30° C. or more at 760 mmHg and 25° C.
4. The positive resist composition as claimed in claim 1 , which further comprises (D) a basic compound.
5. The positive resist composition as claimed in claim 1 , which further comprises (E) a fluorine- and/or silicon-containing surfactant.
6. The positive resist composition as claimed in claim 1 , which further comprises (F) an organic solvent.
7. A pattern forming method comprising: forming a resist film from the positive resist composition claimed in claim 1 ; and exposing and developing said resist film.